2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems &Amp; Eurosensors XXXIII (TRANSDUCERS &Am 2019
DOI: 10.1109/transducers.2019.8808307
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Microprobe with 3D Orthogonal Kinematics for Dimensional Measurement of Industrial Microparts

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“…where k is the stiffness and m is the moving mass [27]. Usually, high eigenfrequencies provide better dynamic performance [28,29]. Therefore, microprobes usually feature excellent dynamic behaviour because of their small mass.…”
Section: Dynamic Effectsmentioning
confidence: 99%
See 1 more Smart Citation
“…where k is the stiffness and m is the moving mass [27]. Usually, high eigenfrequencies provide better dynamic performance [28,29]. Therefore, microprobes usually feature excellent dynamic behaviour because of their small mass.…”
Section: Dynamic Effectsmentioning
confidence: 99%
“…Furthermore, since most microprobes are fragile, the overall movement speed of the machine is reduced to several millimeters per second. The approach speed during discrete point probing is even smaller because the maximum microprobe deflection often ranges from ±20 µm to ±400 µm [28,47], which is small compared to conventional probe heads. Scanning of microgears reduces the measurement time considerably and due to the small scanning speeds, the scanning measurement may often be seen as quasi-static in a first approximation-the differences observed between scanning and discrete point probing with PTB's µCMM were negligible.…”
Section: Ptb's Experience In Scanning Microgears and Large Gearsmentioning
confidence: 99%