Microprofile formation by thermal oxidation of molybdenum films

Kazanskiy, Nikolay L.; Moiseev, O. Yu.; Poletayev, S. D.

doi:10.1134/s1063785016020085

Cited by 63 publications

(8 citation statements)

References 5 publications

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“…[6][7][8][9][10][11][12]. Laser radiation focusators have been under development for the last 35 years, and their use in investigations has led to a large number of different methods being worked out in respect of this use: asymptotic [13][14][15], iterative [16][17], and numerical [18][19] methods of analysis; conformable software for design [20][21][22][23] and modeling [24][25][26][27][28], polymeric [29], plasmachemical [30][31][32][33], mechanical [34],and laser [35][36] methods of production, also instrument facilities and experimental exploratory procedures [37][38][39][40].…”

Section: Introductionmentioning

confidence: 99%

Innovative Applications of Acoustic Waves Focusators

Абульханов

Goryainov²

2016

Collection of Selected Papers of the II International Conference on Information Technology and Nanotechnology

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Abstract. Here, we propose and investigate designs for devices which use acoustic wave focusators. We have modeled the processes involved by use of the ANSYS software. This was done in order to demonstrate the efficiency of diffractive acoustic elements for mixing particles of different densities and for damping high-frequency vibrations. The proposed designs and technological solutions could be used effectively for mixing reactive substances of various fractions and for damping the effects of high-frequency vibrations on precise measuring instruments.Keywords: focusators of acoustic waves, acoustic diffractive elements, numerical modeling, mixing system, damping system of high-frequency vibrations.Citation: Abulkhanov SR, Goryainov DS. Innovative applications of acoustic waves focusators.

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Section: Introductionmentioning

confidence: 99%

Innovative Applications of Acoustic Waves Focusators

Абульханов

Goryainov²

2016

Collection of Selected Papers of the II International Conference on Information Technology and Nanotechnology

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“…Fabrication results after each unit process step have been presented and also the SEM images of the final released structure. Technology of computer optics [5][6][7][8][9][10][11][12] is unable to provide the required parameters of MEMSstructures.…”

Section: Fig 1 Solid Model Of the Devicementioning

confidence: 99%

Su-8 Based Uv-Liga Fabrication Process for Realization of Nickel Based Mems Inertial Sensor

Verma

Khan²,

Fomchenkov

et al. 2016

Collection of Selected Papers of the II International Conference on Information Technology and Nanotechnology

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Abstract. This paper reports the complete fabrication process flow based on UV-LIGA technology for realization of metal based MEMS inertial sensor. In this process, nickel is used as the structural layer and copper as the sacrificial layer. The economical three mask process has been optimized and the detailed step by step procedure for carrying out the fabrication is presented. The optimized process parameters to achieve void free copper and nickel electroplated layers with extremely low roughness have been reported. Footing problem associated with lithography process has been analysed and its solution discussed. The fabrication results after each process step have been presented and discussed. Scanning electron micrograph images of the released prototype inertial sensor devices have been presented to demonstrate the successful fabrication of the prototypes using the economical UV-LIGA process. Keywords: MEMS, UV-LIGA, SU-8 2010, Cu and Ni electroplatingCitation: Verma Payal, Zaman Khan K, Fomchenkov SA, Gopal R. SU-8 based UV-LIGA fabrication process for realization of nickel based MEMS inertial sensor.

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“…Focusators were investi-gated theoretically and experimentally [32][33][34][35][36][37][38][39][40][41]. New methods for the diffractive microrelief formation were developed to create the focusators [42][43][44][45][46][47][48][49][50][51]. In 1989 focusator in a transverse cut with a high intensity distribution at the edges was successfully tested in the US in the Institute "General Motors" for heat strengthening of steel using 3 kW laser of the company "Spectro-physics".…”

Section: Focusators Of Laser Radiationmentioning

confidence: 99%