Microscale, bendable thermoreflectance sensor for local measurements of the thermal effusivity of biological fluids and tissues

Xie, Xu; Diao, Zhu; Cahill, David G.

doi:10.1063/1.5141376

Cited by 3 publications

(2 citation statements)

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“…When the laser beam is focused on the surface, the apparent array of secondary spots marked by red dash circles shows up, which is a known artifact of our CCD camera. These spots are not from the reflections of surface defects on the sample …”

Section: Resultssupporting

confidence: 86%

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Thermal Visualization of Buried Interfaces Enabled by Ratio Signal and Steady-State Heating of Time-Domain Thermoreflectance

Cheng

et al. 2021

ACS Appl. Mater. Interfaces

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Thermal resistances from interfaces impede heat dissipation in micro/nanoscale electronics, especially for high-power electronics. Despite the growing importance of understanding interfacial thermal transport, advanced thermal characterization techniques which can visualize thermal conductance across buried interfaces, especially for nonmetal-nonmetal interfaces, are still under development. This work reports a dual-modulation-frequency TDTR mapping technique to visualize the thermal conduction across buried semiconductor interfaces for β-Ga2O3-SiC samples.Both the β-Ga2O3 thermal conductivity and the buried β-Ga2O3-SiC thermal boundary conductance (TBC) are visualized for an area of 200 μm x 200 μm. Areas with low TBC values (≤20 MW/m 2 -K) are successfully identified on the TBC map, which correspond to weakly bonded interfaces caused by high-temperature annealing. The steady-state temperature rise (detector voltage), usually ignored in TDTR measurements, is found to be able to probe TBC variations of the buried interfaces without the limit of thermal penetration depth. This technique can be applied to detect defects/voids in deeply buried heterogeneous interfaces non-destructively, and also opens a door for the visualization of thermal conductance in nanoscale nonhomogeneous structures.

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Section: Resultssupporting

confidence: 86%

“…These spots are not from the reflections of surface defects on the sample. 28 Figure 6c shows the mapped ratio of Sample_AB. The measured TDTR ratio is very uniform except for the defective area.…”

Section: ■ Results and Discussionmentioning

confidence: 99%

Thermal Visualization of Buried Interfaces Enabled by Ratio Signal and Steady-State Heating of Time-Domain Thermoreflectance

Cheng

et al. 2021

ACS Appl. Mater. Interfaces

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Using transducerless time-domain thermoreflectance technique to measure in- and cross-plane thermal conductivity of nanofilms

Du,

Bo,

et al. 2023

Journal of Applied Physics

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Time-domain thermoreflectance (TDTR) and frequency-domain thermoreflectance techniques have been widely used to measure thermal properties. However, the existence of the metal sensor brings some limitations to the experimental measurement, such as temperature limits, disability to measure low in-plane thermal conductivity, in situ measurement cannot be achieved, etc. This paper proposes a transducerless time-domain thermoreflectance method to measure in- and cross-plane thermal conductivity of nanofilms, in which the optical absorption depth and thermal conductivity tensor are considered to establish a new differential equation that can describe the heat conduction process in multilayer structures. This thermal model can also calculate the effects of spot ellipticity and spot offset distance. Then, the analytical solution and relative deviation of this new model and the surface heat flow boundary model used in conventional TDTR are compared by calculating the phase signals. In terms of experimental measurement, this model is successfully used to derive cross- and in-plane thermal conductivity of PdSi and IrNiTa amorphous alloy nanofilms without a metal sensor.

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Measuring thermal properties of thin layers with rough surfaces by using the bidirectional heat flow approach

Fladischer

Leitgeb

Fernbach

et al. 2022

Tm - Technisches Messen

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Thermophysical properties of materials and the optimization of the heat transfer are becoming more and more important for industrial applications of micro- and nanoelectronic devices. Thin layers in the micrometer to nanometer range are used to give specific functions to the devices. Since the thermophysical properties of thin layers differ from bulk material, this data is required for precise predictions of thermal management. One way to obtain the thermal properties of thin layers is the optical-based Time Domain Thermoreflectance (TDTR) method. To carry out TDTR measurements with a low level of uncertainty, the samples under study must meet requirements related to the surface roughness and a low level of optical scattering. The range of samples analysable by TDTR can be extended by applying the so-called bidirectional heat flow approach. This approach opens the possibility to assess thermal properties of materials with rough surfaces as well. The validity of the implemented model was shown by the characterisation of a test sample with well-known thermal properties fabricated for this purpose out of poly(methyl methacrylate) (PMMA) roughened with acetone:ethanol. The results obtained by TDTR measurements were compared to literature values, demonstrating the applicability of the bidirectional heat flow approach for this setup.

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Microscale, bendable thermoreflectance sensor for local measurements of the thermal effusivity of biological fluids and tissues

Cited by 3 publications

References 50 publications

Thermal Visualization of Buried Interfaces Enabled by Ratio Signal and Steady-State Heating of Time-Domain Thermoreflectance

Thermal Visualization of Buried Interfaces Enabled by Ratio Signal and Steady-State Heating of Time-Domain Thermoreflectance

Using transducerless time-domain thermoreflectance technique to measure in- and cross-plane thermal conductivity of nanofilms

Measuring thermal properties of thin layers with rough surfaces by using the bidirectional heat flow approach

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