2015
DOI: 10.1109/jphotov.2015.2392945
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Microscale Spatially Resolved Characterization of Highly Doped Regions in Laser-Fired Contacts for High-Efficiency Crystalline Si Solar Cells

Abstract: Abstract-Laser-fired contact (LFC) processes have emerged as

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Cited by 15 publications
(15 citation statements)
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“…The red shift at the central part of the laser spot, which increases for a LPRs performed at 2 W (gray spectrum with crossed points), is representative of a stressed Si structure [22], and can be induced by the laser processing. These conclusions are in agreement with an exhaustive micro-Raman spectroscopy analysis of LPRs presented elsewhere [9]. In particular, such study reveals that c-Si structure only suffers structural changes inside the laser-processed spot, but not at the surrounding regions.…”
Section: B Laser-induced Impact On the C-si Wafersupporting
confidence: 92%
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“…The red shift at the central part of the laser spot, which increases for a LPRs performed at 2 W (gray spectrum with crossed points), is representative of a stressed Si structure [22], and can be induced by the laser processing. These conclusions are in agreement with an exhaustive micro-Raman spectroscopy analysis of LPRs presented elsewhere [9]. In particular, such study reveals that c-Si structure only suffers structural changes inside the laser-processed spot, but not at the surrounding regions.…”
Section: B Laser-induced Impact On the C-si Wafersupporting
confidence: 92%
“…This fact has been demonstrated by the detection of dislocations [7] and certain levels of mechanical stress [8], [9] in the regions processed by laser. In addition to these micro-structural studies, other analysis such as the study of the composition [10], the estimation of the doping level [8], [9], and the study of the electronic properties [11], [12] of LPRs have been also carried out in the last years. Most of these investigations are exclusively focused on the study of the features and properties of the locally molten material volume, however, no detailed analyses at the surrounding area of LPRs have been performed up to now.…”
Section: Introductionmentioning
confidence: 92%
“…The proposed method for R base determination is particularly well suitable for rear contact techniques where the real electrical contact size is not accurately known, as in laser fired contacts. In fact, recently a micro-scale study of the doping density distribution along the laser processed spots has been reported with evidences of low doped regions in the spot perimeter [33]. All this information is very important for an accurate development of these devices, in particular for the optimum pitch determination, and illustrates the usefulness of the method proposed in this work.…”
Section: Results On Experimental Samplesmentioning
confidence: 60%
“…Despite the fact that this methodology can be applied to room-temperature measurements, it is more precise for cryogenic temperature studies where the contribution of phonon energies to indirect radiative transitions is much lower and then the resulting narrower PL lines can be more precisely fitted. As presented elsewhere, 12 we propose an alternative and simple PL method for studying variations in doping densities at room temperature. Figure 4 shows the normalized PL spectra recorded at room temperature from calibrated p-type c-Si wafers with different doping densities, i.e., 7 Â 10 17 , 5 Â 10 18 , 4 Â 10 19 , and 1 Â 10 20 cm À3 .…”
Section: B Doping Density Quantification Via Micro-pl Spectroscopymentioning
confidence: 99%
“…8 Confocal micro-PL spectroscopy has become during the last few years an important experimental tool for developing novel and comprehensive studies of advanced solar cell concepts 9 with micron resolution. In particular, micro-PL measurements have been extensively used to perform highresolution spatially resolved studies of different properties and material features, including the analysis of microstructural defects, 10 the estimation of doping densities, 11,12 and the detection of precipitates and impurities. 13 In confocal micro-PL measurements, a laser light is focused onto the surface of the sample to be studied by microscope objectives, and the backscattered PL signal is collected via a confocal aperture.…”
Section: Introductionmentioning
confidence: 99%