2000
DOI: 10.1063/1.1310345
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Microscopic lock-in thermography investigation of leakage sites in integrated circuits

Abstract: The detection limit of infrared thermographic investigations can be improved down to 10 µK by using a highly sensitive high-speed infrared camera in an online averaging lock-in thermography system. Together with a microscope objective, this allows lock-in thermography to be used as a simple and sensitive technique to localize the sites of leakage currents and other heat sources in electronic components. The practical realization of a novel lock-in thermography system is described and both test measurements and… Show more

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Cited by 85 publications
(52 citation statements)
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“…This technique was developed already before it was introduced to pho− tovoltaics [16] and since then mainly used in non−destruc− tive testing, hence for "looking below the surface of bodies" [17]. In the following LIT was also used for investigating local leakage currents in integrated circuits [18] and in solar cells [19]. Meanwhile, LIT is a widely used standard imag− ing method for characterizing solar cells, which is commer− cially available.…”
Section: Introductionmentioning
confidence: 99%
“…This technique was developed already before it was introduced to pho− tovoltaics [16] and since then mainly used in non−destruc− tive testing, hence for "looking below the surface of bodies" [17]. In the following LIT was also used for investigating local leakage currents in integrated circuits [18] and in solar cells [19]. Meanwhile, LIT is a widely used standard imag− ing method for characterizing solar cells, which is commer− cially available.…”
Section: Introductionmentioning
confidence: 99%
“…This system with 128*128 pixel resolution shows a noise level of about 20 µK after 1000s measure time and, combined with a special microscope objective, it can reach a spatial resolution of 5 µm. This was the first system which demonstrated the power of the microscopic lock-in thermography for investigating integrated circuits [6]. Based on this system Thermosensorik GmbH Erlangen [7] has developed the commercial system TDL 384 M 'Lock-in'.…”
Section: °Smentioning
confidence: 99%
“…A spatially resolved nondestructive assessment of the module performance can be undertaken with light-beam-induced current or thermographic systems [67,[84][85][86]. The light-beam-induced current technique (LBIC) maps the spatial distribution of the photocurrent in the module.…”
Section: Laser-based Characterization Methods For Tf Photovoltaicsmentioning
confidence: 99%