“…Apart from the strain induced by lattice mismatching, the observed N/Nb inhomogeneity might also be associated with N:Nb stoichiometric deviations introduced by the presence of a considerable amount of N vacancies, which is typical in NbN films. ,,, Alongside the formation of secondary NbO x phases, O atoms that are incorporated within NbN films as local substitutional or interstitial point defects typically play a pivotal role in tuning the superconducting properties of NbN layers and, hence, the quantum behavior of NbN/Al 2 O 3 /NbN trilayers. , Because of the detection limit of correlative TEM and APT, it is extremely difficult to probe the formation of local point defects, such as N vacancies and substitutional/interstitial O impurities, and their effects on the local structure of NbN films. To address this information void, a theoretical investigation using first-principles DFT calculations was adapted in the next part of this work to provide a complete understanding of the effect of local point defects on the NbN crystal structure and its properties.…”