2008
DOI: 10.1016/j.jnoncrysol.2007.09.107
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Microscopic study of the H2O vapor treatment of the silicon grain boundaries

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Cited by 13 publications
(9 citation statements)
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“…Kelvin probe force microscopy (KFM) is considered one of the most powerful methods for evaluating potential variations in the GB characteristics. For polycrystalline Si and compound semiconductors, the GBs characteristics have been discussed in detail in terms of GB band lineup and barrier height using KFM[85][86][87][88]. In this study, we analyzed the potential variations and barrier heights around GBs in BaSi2 epitaxial films both on Si(111) and Si(001) substrates using KFM in air.Figs.…”
mentioning
confidence: 99%
“…Kelvin probe force microscopy (KFM) is considered one of the most powerful methods for evaluating potential variations in the GB characteristics. For polycrystalline Si and compound semiconductors, the GBs characteristics have been discussed in detail in terms of GB band lineup and barrier height using KFM[85][86][87][88]. In this study, we analyzed the potential variations and barrier heights around GBs in BaSi2 epitaxial films both on Si(111) and Si(001) substrates using KFM in air.Figs.…”
mentioning
confidence: 99%
“…For polycrystalline Si and compound semiconductors, GBs character was discussed in detail from the view points of band lineup and barrier height around the GBs using KFM. [19][20][21][22] In this study, we analyzed potential variations and barrier heights around the GBs in BaSi 2 epitaxial films both on Si(111) and Si(001) substrates using KFM.…”
mentioning
confidence: 99%
“…Contrary to this, if the steam pressure is too high, there is an undesirably high concentration of the passivating particles that can shift chemical equilibrium of a particular subreaction of the passivation process and prevent further saturation of defects. Another explanation can be that hydrogen introduced new structural defects into silicon as already presented in some previous studies [15,27].…”
Section: 2mentioning
confidence: 75%
“…Passivating species can be for instance hydrogen radicals produced by the commonly used plasma hydrogenation process [13]. Nevertheless, water vapour has a similar passivation potential according to the previous investigations [14,15] and lower processing costs make it very attractive.…”
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confidence: 99%