Microscopic TV Holography for Microsystems Metrology

Kumar, Umesh; Somasundaram, U.; Kothiyal, M. P.; Mohan, N. Krishna

doi:10.14429/dsj.61.908

Cited by 2 publications

(1 citation statement)

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“…DSPI with phase shifting technique is well established for measurement of deformation and surface shape on both smooth and rough samples. Such systems are important in quality testing (functionality, reliability and integrity of the components) of Microsystems such as Micro-Electro-Mechanical Systems (MEMS) [9][10][11][12][13]. In 1λ-phase shifting interferometry (1λ-PSI), a serious limitation to their use is that the surface height/depth of less than half a wavelength only can be measured unambiguously [14].…”

Section: Intruductionmentioning

confidence: 99%

RGB speckle pattern interferometry for surface metrology

Rajendran

Pramanik

2020

Quantitative Phase Imaging VI

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Digital speckle pattern interferometry (DSPI) has been widely used for surface metrology of optically rough surfaces. Single visible wavelength can provide high measurement accuracy, but it limits the deformation measurement range of the interferometer. Also, it is difficult to reveal the shape of a rough surface with one wavelength in normal illumination and observation geometry. Using more than one visible wavelength in DSPI, one can measure large deformations as well as shape using synthetic wavelength approach. In this work, we will discuss multi-wavelength speckle pattern interferometry using a Bayer RGB sensor. The colour sensor allows simultaneous acquisition of speckle patterns at different wavelengths. The colour images acquired using RGB sensor is split in to its individual components and corresponding interference phase map is recovered using error compensating phase shifting algorithm. The wrapped phase is unwrapped to quantify the deformation or shape information of the sample under inspection. Theoretical background of RGB interferometry for deformation and shape measurements, and experimental results will be presented.

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Section: Intruductionmentioning

confidence: 99%

RGB speckle pattern interferometry for surface metrology

Rajendran

Pramanik

2020

Quantitative Phase Imaging VI

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Multiple wavelength fringe analysis for surface profile measurements

Pramanik

2019

Quantitative Phase Imaging V

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Interferometry has been widely used for surface metrology because of their precision, reliability, and versatility. Although monochromatic-light interferometery can provide high sensitivity and resolution, but it fails to quantify largediscontinuities. Multiple-wavelength techniques have been successfully used to extend the unambiguous step height measurement rage of single wavelength interferometer. The use of RGB CCD camera allows simultaneous acquisition of fringes generated at different wavelengths. In this work, we discuss details about the fringe analysis of white light interferograms acquired using colour CCD camera. The colour image acquired using RGB camera is decomposed in to red, green, blue components and corresponding interference phase is measured using phase evaluation algorithms. The approach makes the 3D surface measurements faster, cost-effective for industrial applications.

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Microscopic TV Holography for Microsystems Metrology

Cited by 2 publications

References 0 publications

RGB speckle pattern interferometry for surface metrology

RGB speckle pattern interferometry for surface metrology

Multiple wavelength fringe analysis for surface profile measurements

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