“…The period of the formed structure is typically larger than halfwavelength, λ∕2, with a strong dependence on the angle of incidence [4,5]. However, under femtosecond (fs) laser irradiation, periods slightly smaller than the laser wavelength [therefore, subwavelength structures (SWS)] [3,4], as well as deep-subwavelength structures (DSWS) [6][7][8][9][10][11] with periods considerably smaller than λ∕2, were observed on transparent materials and semiconductors. Up to now, these two types of surface structures have become a universally observed feature in the fs laser multipulse ablation [3][4][5].…”