Microstructural Characterization and Self‐Propagation Properties of Reactive Al/Ni Multilayers Deposited onto Wavelike Surface Morphologies: Influence on the Propagation Front Velocity

Surface structuring methods are crucial in semiconductor manufacturing, as they enable the creation of intricate structures on the semiconductor surface, influencing the material’s electrical, mechanical, and chemical properties. This study employs one such structuring method known as reactive ion etching to create black Si structures on silicon substrates. After thermal oxidation, their influence on the reaction of Al/Ni nanoscale multilayers is. For this purpose, various densities of thermally oxidized black Si structures are investigated. It reveals distinct reactive behaviors without corresponding differences in energy release during differential scanning calorimetry measurements. Higher oxidized black Si structure densities result in elevated temperatures and faster reaction propagation, showing fewer defects and reduced layer connections in cross‐sectional analyses. The properties of the reactive multilayers on high structure density show the same performance as a reaction on flat thermal SiO2, causing delamination when exceeding 23 structures per µm2. Conversely, lower structure density ensures attachment of reactive multilayers to the substrate due to an increased number of defects, acting as predetermined breaking points for the AlNi alloy. By establishing the adhesion between the reacted multilayer and the substrate, surface structuring could lead to a potential increase in bond strength when using reactive multilayers for bonding.This article is protected by copyright. All rights reserved.

Influence of Increasing Density of Microstructures on the Self‐Propagating Reaction of Al/Ni Reactive Nanoscale Multilayers

Jaekel,

Riegler,

Sauni Camposano

et al. 2024

Impact of Substrate Thickness and Surface Roughness on Al/Ni Multilayer Reaction Kinetics

Vardo,

Sauni Camposano,

Matthes

et al. 2024

Reactive multilayers comprising alternating nanoscale layers of Al and Ni, exhibit potential across various applications, including localized heating for welding and joining. Control over reaction properties is pivotal for emerging applications, such as chemical time delays or neutralization of biological or chemical weapons. This research offers insights into the intricate interplay between substrate thickness, surface roughness, and the behavior of Al/Ni reactive multilayers, opening avenues for tailored applications in various domains. To observe this interplay, silica with various thicknesses from 0.4 µm to 1.6 µm was deposited on polished single crystalline Si and rough poly‐Si base substrates. Additionally, to analyze the impact of varying silica thickness along the sample length on reaction behavior, silica in step‐like shape was fabricated. Subsequently, Al/Ni multilayers with 5 µm total thickness and 20 or 50 nm bilayer periodicities were deposited. Reaction velocity and temperature were monitored with a high‐speed camera and pyrometer. Results indicate that silica thickness significantly affects self‐propagation in multilayers. The reaction is not self‐sustained for silica layers ≤ 0.4 µm, depending on bilayer periodicity and substrate roughness. The velocity increases or decreases based on the direction of reaction propagation, whether it moves upwards or downwards, in relation to the thickness of silica.This article is protected by copyright. All rights reserved.

Tailoring the Reaction Path: External Crack Initiation in Reactive Al/Ni Multilayers

Matthes,

Glaser,

Vardo

et al. 2024

The influence of intentionally externally induced cracks in reactive Al/Ni multilayer systems is investigated. These cracks affect the reaction dynamics and enable tailoring of the reaction path and the overall velocity of the reaction front. The influence of layer variations onto mechanical crack formation and resulting reaction behavior are investigated. High‐speed camera imaging shows the meandering propagation of the reaction front along the crack paths. Therefore, the mechanical cracking process significantly changes the total velocity of the reaction front and thus offers a possibility to control the self‐propagating high‐temperature synthesis process. It is shown that the phase formation remains unaffected despite the applied strains and cracks. This favorable stability in phase formation ensures predictability and provides insight into the adaptation of RMS for precision applications in joints. The results expand the understanding of mechanical cracking as a tool to influence high temperature synthesis in reactive multilayer coatings and provide an opportunity to expand the range of applications.This article is protected by copyright. All rights reserved.