Microstructural characterization, mechanical properties and erosion behavior of Y2O3–MgO nanocomposite films by magnetron sputtering

Wang, Wei-Kai; Chang, Yu-Hao; Jung, Chih-Feng; Huang, San-Yuan; Tsai, Pi‐Chuen

doi:10.1016/j.ceramint.2022.12.267

Cited by 6 publications

(2 citation statements)

References 25 publications

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“…Furthermore, the discrete dots observed on the periphery of the selected area electron diffraction (SAED) of Ru nanoparticles on the Y 2 O 3 dielectric layer confirm the presence of the (100) crystal plane of the Ru nanoparticles (Figure f). On the other hand, the HRTEM of the Y 2 O 3 film revealed a lattice spacing of 0.305 nm (Figure g-h), corresponding to its (222) crystal plane . The diffraction ring in Figure f indicates the polycrystalline nature of Y 2 O 3 , with the widening of the ring being attributed to the small size of each Y 2 O 3 domain.…”

Section: Resultsmentioning

confidence: 95%

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High-Performance Ammonia Gas Sensor Based on a Catalytic Ruthenium- Gated Field-Effect Transistor

He,

Guo,

Ren

et al. 2024

ACS Appl. Nano Mater.

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The catalytic performance of ruthenium (Ru) in the synthesis and decomposition of ammonia (NH 3 ) has attracted extensive attention and research. Considering its selective adsorption and excellent catalytic effect toward NH 3 , it holds significant potential in the field of ammonia detection. In this study, we present a high-performance NH 3 sensor that was based on a catalytic metal gate field-effect transistor (FET) utilizing Ru nanoparticles as the sensitive gate (Ru-FET). The sensor exhibits a high response of 11.3% to 1 ppm of NH 3 at room temperature, with quick response and recovery processes of 8 and 85 s, respectively. Meanwhile, the sensor possesses a detection range of 0.4−20 ppm along with good repeatability and selectivity. The exceptional performance of the Ru-FET sensor suggests the potential of judiciously combining sensitive materials and sensor structures to manufacture high-performance NH 3 sensors operating at room temperature.

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Section: Resultsmentioning

confidence: 95%

“…On the other hand, the HRTEM of the Y 2 O 3 film revealed a lattice spacing of 0.305 nm (Figure 2g-h), corresponding to its (222) crystal plane. 48 The diffraction ring in Figure 2f…”

Section: Resultsmentioning

confidence: 99%

High-Performance Ammonia Gas Sensor Based on a Catalytic Ruthenium- Gated Field-Effect Transistor

He,

Guo,

Ren

et al. 2024

ACS Appl. Nano Mater.

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A Review on Potential Mechanically Resistant Materials for Optical Multifunctional Surfaces: Bioinspired Surfaces with Advanced Properties

Sarieddine,

Kadiri,

Guelorget

et al. 2023

Adv Materials Inter

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Mimicking naturethrough nanostructuring allows the creation of multifunctional surfaces withremarkable properties, such as anti‐reflectivity, high optical transmittanceand controlled wettability, enabling anti‐icing or anti‐fogging behaviors. These multifunctionalsurfaces have gained significant interest in civil and military domains. However,integrating them into real‐life applications faces challenges related tocost, high‐throughput large‐scale compatible nanofabrication techniques, andtheir mechanical resistance. While sub‐wavelength patterning improves the optical performance,it often comes at the cost of compromising the mechanical resistance. As opticalperformance improves, mechanical resistance tends to deteriorate, and viceversa. To address this challenge, taking inspiration from the lotus leafstructure, where patterns are covered by a thin 2D wax film, covering thepatterns of structured surfaces with a protective layer can be a viablesolution. This protective layer should enhance the mechanical resistance of thesurface without compromising its multifunctional capabilities. This reviewhighlights the most suitable materials that can be employed as protectivecoatings and their potential to enhance the resistance of structured surfaces.The fundamental concept behind the creation of multifunctional optical surfacesis discussed, followed by a comprehensive examination of mechanical tests thatcan be utilized to characterize their mechanical behavior. This review aims topave the way for the development of durable multifunctional optical surfaces,making them more amenable to industrial applications.

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Physiochemical etching characteristics and surface analysis of Y2O3-MgO nanocomposite under different CF4/Ar/O2 plasma atmospheres

Ma,

Park,

Kim

et al. 2023

Applied Surface Science

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Microstructural characterization, mechanical properties and erosion behavior of Y2O3–MgO nanocomposite films by magnetron sputtering

Cited by 6 publications

References 25 publications

High-Performance Ammonia Gas Sensor Based on a Catalytic Ruthenium- Gated Field-Effect Transistor

High-Performance Ammonia Gas Sensor Based on a Catalytic Ruthenium- Gated Field-Effect Transistor

A Review on Potential Mechanically Resistant Materials for Optical Multifunctional Surfaces: Bioinspired Surfaces with Advanced Properties

Physiochemical etching characteristics and surface analysis of Y2O3-MgO nanocomposite under different CF4/Ar/O2 plasma atmospheres

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