Self-organized patterns, realized in non-equilibrium processes, have been widely observed in physics and chemistry. As a powerful tool to create far-from-equilibrium environments, irradiation produces a variety of types of defects, which can self-organize through physical interactions and chemical reactions. Such a process becomes complicated especially when both thermodynamics and kinetics play critical roles in pattern formation. In this paper, we investigate the formation and self-organization mechanism of void superlattices in metals and alloys under irradiation through phase field modeling and simulations. For the first time, three different formation mechanisms of void superlattices are clearly distinguished according to their thermodynamic origin and reaction kinetics. It is found that the characteristic length and symmetry of an emerging superlattice is determined by the interplay of the thermodynamic driving force and the kinetic anisotropy of the system. Through parametric study, the effects of kinetic coefficients, such as atomic mobility and irradiation dose rate, on the nucleation, growth, coarsening, coalescence, and ordering of voids are systematically investigated. The theoretical model developed in this work may provide guidelines for designing desired self-organized microstructures under irradiation.