Microstructural characterization of MoO3–TiO2 nanocomposite thin films for gas sensing

Li, Y.X; Galatsis, K.; Włodarski, W.; Passacantando, M.; Santucci, S.; Siciliano, P.; Catalano, M.

doi:10.1016/s0925-4005(01)00668-2

Cited by 37 publications

(15 citation statements)

References 12 publications

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“…On the surface of all annealed samples, the oxides were found in the stoichiometric forms of MoO 3 and SnO 2 , with characteristic binding energy (BE) values of 232.6 eV for Mo(VI) and 486.6 eV for Sn(IV). 18,21,23 The same oxides were identified on the surface of as-deposited (i.e. not annealed) samples, but the thickness of these native oxides was very low (¾2-3 nm), whereas both components in the volume of the films were in the pure metallic states of Sn(0) and Mo(0).…”

Section: Mixed Mo-sn Oxidesmentioning

confidence: 81%

“…This result can be explained by the segregation and evaporation of MoO 3 crystallites from the film surface during thermal treatment. 3,10,18 The strong effect of Mo removal is better illustrated in Fig. 2, where the dependence of the XPS atomic ratio of Mo/Sn on the sample annealing temperature is displayed.…”

Section: Mixed Mo-sn Oxidesmentioning

confidence: 95%

“…In this study, we investigate the chemical composition of the optimized gas-sensitive films of Mo-Ti, 17,18 Mo-W 19 and Mo-Sn 20 oxides. The results of selected-area XPS depth profiling are discussed in the light of the recent data on gas sensitivity and film structure.…”

Section: Introductionmentioning

confidence: 99%

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Investigation of thin films of mixed oxides for gas‐sensing applications

Kačiulis¹,

Pandolfi²,

Viticoli³

et al. 2002

Surface & Interface Analysis

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Recently, the thin films of some mixed metal oxides (Mo, Ti, Sn, W, etc.) have been indicated as very promising materials for gas-sensing applications. Nevertheless, there is still a significant lack of experimental information on these compounds, where the surface properties can be defined not only by their chemical composition but also by the nanosized morphology of the films.In this study we report the results of XPS investigations of Mo-Ti, Mo-Sn and Mo-W oxides. The films of mixed oxides with different composition ratios were prepared by sol-gel and magnetron sputtering techniques. The gas sensitivity of the films at different temperatures was studied by measuring the electrical response to typical gases.Selected-area XPS depth profiling of the samples was carried out by using cyclic Ar + sputtering. The separation of different chemical species of the same element and quantitative analysis of experimental depth profiles enabled us to reveal completely the chemical composition of the films investigated. In such a way, the samples of mixed oxides, prepared by two different techniques and annealed at different temperatures (450-700• C), were characterized and compared.

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Section: Mixed Mo-sn Oxidesmentioning

confidence: 81%

Section: Mixed Mo-sn Oxidesmentioning

confidence: 95%

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Investigation of thin films of mixed oxides for gas‐sensing applications

Kačiulis¹,

Pandolfi²,

Viticoli³

et al. 2002

Surface & Interface Analysis

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“…The chemical nature of ZnO source (zinc acetate solid salt, zinc acetate alcoholic solution or ZnO nanopowder) used for the sol preparation was found to significantly affect the thermal decomposition of complex precursor and the microstructure and properties of the nanocomposite thin films ( b (Cantalini, 2005). Other mixed metal oxides nanocomposite films prepared by the sol-gel process include SiO 2 -NiO films ((100-X)SiO 2 -XNiO with X = 10, 20, 40) ( a ; MoO 3 -TiO 2 films (Li, 2001); Fe 2 O 3 -SnO 2 films for detecting NO 2 and C 2 H 5 OH gas (Kotsikau, 2004); NiO-SiO 2 films for detection of H 2 , CO and humidity (Martucci, 2004& b Martucci, 2003; In 2 O 3 -SnO 2 film for detecting H 2 at ppm-level at room temperature (Satyajit, 2005); and Li and Ti co-doped NiO nanocomposites (Li 0.1 Ti 0.018 Ni 0.882 ) for detecting toluene, ethanol and chloroform (Qureshi, 2009). PVD process has also been used to deposit mixed metal oxide nanocomposite films.…”

Section: Fabricationmentioning

confidence: 99%

Nanocomposite Films for Gas Sensing

Yang¹

2011

Advances in Nanocomposites - Synthesis, Characterization and Industrial Applications

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“…6) Recently, anatase phase TiO 2 has been studied as a sensing material for ethanol and hydrogen gases. 7,8) Another popular gas sensing material is SnO 2 due to its good sensitivity to reducing gases. [9][10][11] Both TiO 2 and SnO 2 are widely used as sensing materials because they exhibit rather obvious changes in electrical resistance when the target gas is adsorbed by the surface of the material.…”

Section: Introductionmentioning

confidence: 99%

Characterization of SnO<sub>2</sub>/TiO<sub>2</sub> Double-Layer Films as Alcohol Sensing Materials

et al. 2004

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The aim of this study is to improve the sensitivity of alcohol sensors by combining the advantages of TiO 2 and SnO 2 films in a double layer device. In this study, an RF magnetron sputtering system was employed to fabricate SnO 2 /TiO 2 double-layer and SnO 2 single-layer films for applications as alcohol sensors.The TiO 2 layer of the SnO 2 /TiO 2 double-layer thin film and the SnO 2 single-layer film were all deposited under various O 2 /Ar ratios of 0.2, 0.4, 0.6, and 0.8. The SnO 2 layer, the top coating of SnO 2 /TiO 2 double-layer, was deposited at a fixed O 2 /Ar ratio of 0.2 with an argon flow rate of 50 sccm. The crystal structure and surface morphology of the films were examined by X-ray diffraction (XRD), Grazing Incident X-Ray Diffraction (GID) and Scanning Electron Microscopy (SEM). The sensitivity value of the film can be calculated from the change in the resistance of the film when exposed to alcohol.The results show that SnO 2 /TiO 2 double layer films have better sensitivity and quicker recovery time compared to those of single-layer SnO 2 films.

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Microstructural characterization of MoO3–TiO2 nanocomposite thin films for gas sensing

Cited by 37 publications

References 12 publications

Investigation of thin films of mixed oxides for gas‐sensing applications

Investigation of thin films of mixed oxides for gas‐sensing applications

Nanocomposite Films for Gas Sensing

Characterization of SnO<sub>2</sub>/TiO<sub>2</sub> Double-Layer Films as Alcohol Sensing Materials

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