2019
DOI: 10.1007/s12034-018-1699-7
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Microstructure and mechanical performance of (AlCrNbSiTiV)N films coated by reactive magnetron sputtering

Abstract: (AlCrNbSiTiV)N films are prepared on cermet cutter tool substrates using direct current reactive magnetron sputtering with a high-entropy alloy target. The use of a grey based Taguchi method to determine the deposition parameters of (AlCrNbSiTiV)N films has been studied by considering multiple performance characteristics. Taguchi quality design concept with an L 9 (3 4) orthogonal array, signal-to-noise ratio and analysis of variance are used to determine the performance characteristics of the deposition proce… Show more

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Cited by 5 publications
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“…Hence, Grey relational analysis (GRA) optimization techniques are used to resolve complex interdependence of sputtering process parameters and obtain unique (single) optimal solution thus reducing the unpredictability in choosing input sputtering parameters. 2023…”
Section: Introductionmentioning
confidence: 99%
“…Hence, Grey relational analysis (GRA) optimization techniques are used to resolve complex interdependence of sputtering process parameters and obtain unique (single) optimal solution thus reducing the unpredictability in choosing input sputtering parameters. 2023…”
Section: Introductionmentioning
confidence: 99%