Microstructure and mechanical properties of nickel microparts electroformed in replicated LIGA molds

Abstract

Corresponding author: amorale@sandia.gov; phone 925 294 3540; fax 925 294 3410; ABSTRACT A novel process for the rapid replication of electroforming plastic micromolds has been developed and is now being used to produce plated nickel test specimens. The process combines hot embossing or injection molding with metallic microscreens to produce sacrificial electroforming molds with conducting bases and insulating sidewalls. The replicated micromolds differ from standard LIGA molds in that the holes in the microscreen act as insulating defects in the electroforming base. The effects of such defects on the materials properties of electroformed microparts will be discussed and it will be shown that when the surface irregularities corresponding to the microscreen holes are removed, mechanical properties are experimentally indistinguishable from those found in conventionally processed LIGA specimens.

Microstructure and mechanical properties of nanocrystalline nickel prepared by pulse reverse microelectroforming

“…LIGA is a leading technology for producing high aspect ratio metal microcomponents. A key step during the LIGA process is the electroforming of a metal or metal alloy [5,6]. The principal advantages of microelectroforming are high-dimensional precision and precise reproduction of surface detail.…”

A study on utilizing a chloride bath to electroform MEMS devices with high aspect ratio structures

“…developments in the electrodeposition of Ni and Ni-based alloys have been summarized by Orinakova et al [3]. A novel process for rapid replication of the plastic micromolds has been developed by Morales et al in Sandia National Laboratories using an electroforming technique [4]. Since electroforming technology determines the product yield and device performance, it plays a crucial role in design and fabrication of non-silicon MEMS devices [5,6].…”