A series of SnO x -Sb 2 O 3 thin film varistors were fabricated through hot-dipping tin oxide films deposited by radio-frequency magnetron sputtering in Sb 2 O 3 powder at varied temperatures in air. With the increase in hot-dipping temperature (HDT) from 200°C to 600°C, the nonlinear coefficient (a) of the samples increased first and then decreased, reaching the maximum at 500°C, which was mainly determined by the completeness of high-resistant Sb 2 O 3 layer at tin oxide grain boundary and the chemical composition of tin oxide films. Correspondingly, the leakage current (I L ) decreased first and increased later. The breakdown electric field (E 100 mA ) decreased constantly with increasing HDT. The SnO x -Sb 2 O 3 film varistors prepared at 500°C exhibited the optimum nonlinear properties with the maximum a of 10.88, the minimum I L of 36.3 mA/cm 2 , and an E 100mA of 0.0188 V/nm. The obtained nanoscaled film varistors would be promising in electrical/electronic devices working in low voltage.
K E Y W O R D Selectrical properties, hot-dipping, RF magnetron sputtering, SnO 2 varistor, thin film
| INTRODUCTIONVaristors are a type of electronic devices possessing nonlinear current-voltage properties, which can sense and limit transient surges repeatedly and quickly, and are usually used to protect power system and electronic devices from being destroyed by over-voltages. With the development of material science and engineering, besides the most commercially available ZnO-based ceramic varistors, a wide variety of alternative ceramic systems have been remarkably expanded, including TiO 2 -, SrTiO 3 -, WO 3 -, CeO 2 -, and SnO 2 -based varistors.