“…In the literature, only methods for the measurement of internal stress in thin films in the field of hybrid integrated circuits and semiconductor chips are described. The main reason for the measurement of internal stress in thin films is the possibility of significant defect formation due to high internal stress in the range of GPa [ 27 , 28 , 29 , 30 ] and the fact that the inner structure of thin films is much more homogeneous compared to that of thick films, which contain more components and pores, and their surface is not smooth [ 4 , 31 ]. Internal stress in thin films can be measured by the following methods: laser scanning, multi-beam optical stress sensor, grid reflection, coherent gradient sensor (CGS), X-ray diffraction, and cantilever [ 32 , 33 , 34 , 35 , 36 , 37 , 38 , 39 ].…”