Fabrication of high-temperature superconducting thin films (Y-Ba-Cu-0, Bi-Sr-Ca-Cu-0, TI-Ba-Ca-CbO systems) by chemical vapour deposition (CVD) is reviewed. The key to the use of the CVD method is to find volatile compounds for the metallic constituents of superconductors. /?diketonate complexes such as acetylacetonates and dipivaloyimethanates have been successfully used as source materials. The quality of the films grown is affected by the deposition temperature, substrate material and postdeposition annealing procedure. Considerable progress has recently been made and the critical properties of cvD-grown films are now equal to those of physical vapour-deposited films.