The results presented in this paper concern the modification of NiAl and Ni 3 Al alloys with reactive elements that increase their high temperature oxidation resistance. Literature data indicate that even trace additions of Hf to aluminide coatings significantly improve the resistance to oxidation in the range of 1100-1150°C, however the exact mechanism of its influence is not yet known. In order to determine the influence of various additions of Hf on high temperature oxidation of aluminide coatings, cyclic oxidation tests were performed at 1150°C of model NiAl and Ni 3 Al alloys with different Hf additions-from 0.25 wt.% to 1.5 wt.%. High resolution electron microscopy, as well as chemical composition analysis techniques, were applied to perform a detailed characterisation of the influence of Hf on the substructure, chemical and phase composition in the nano scale of oxide scales formed during high temperature oxidation.