Microstructure Evolution and Resistivity of Cu(B) Alloy Films on Ti Underlayer at the Early Stage of Annealing at 500 ℃

Hong, T.K.; Lee, S.; Han, D. M.; Lee, J. G.; Lee, J. H.; Kim, D. H.; Jeong, Changwook; Ruh, Hyun; Lee, E. G.; Kang, Chris

doi:10.3365/met.mat.2008.10.631

Cited by 1 publication

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“…where ρ and V represent the individual resistivities and volume fractions, respectively, of the respective phases. As a result, the use of equation ( 3 scattering is the main contributor to the resistivity and that the effect of the heterogeneous grain boundary between the Al and Al 3 Ni grains is negligible, the dependence of the resistivity of the Al 3 Ni and Al phases on the grain size can be described using the following simplified equation [28]:…”

Section: Correlation Between Grain Size and Resistivity In Al-ni-allo...mentioning

confidence: 99%

Effects of a Ni alloying element on Al–Ni metallization

Lee¹,

Han²,

Jeong³

et al. 2011

Semicond. Sci. Technol.

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The effect of the Ni content (2-18 at.% Ni) in Al thin films on their resistivity, hillock formation and Al 3 Ni compound formation was investigated. The as-deposited Al-Ni-alloy films showed high elastic strains which increased with increasing Ni content. In addition, the annealing of the supersaturated Al-Ni-alloy thin films yielded two phases: Al 3 Ni and Al with strong (2 2 0) and (1 1 1) textures, respectively, suggesting that the nucleation of (2 2 0) Al 3 Ni is closely associated with (1 1 1) Al. The resistivity of the as-annealed Al-Ni-alloy films varied as functions of the volume fraction and grain size of the two phases, which were determined by the Ni content and annealing temperature, respectively. The hillock formation was effectively suppressed when a small amount of Ni was added to the Al alloy. The results showed that a Ni content of less than approximately 4.5 at.% produced hillock-free Al-alloy thin films with a low resistivity of less than 6.0 μ cm upon annealing at 350 • C.

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Section: Correlation Between Grain Size and Resistivity In Al-ni-allo...mentioning

confidence: 99%