2013
DOI: 10.1088/0960-1317/23/3/035018
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Microstructure formation in a thick polymer by electrostatic-induced lithography

Abstract: This article demonstrates the manufacturing of microstructures in a thick polymer using electrostatic-induced lithography. Unlike previous work reported elsewhere, it focuses on the fabrication of structures from meso-to micro-scale. The electrostatic-induced lithography technique is proven to work with not only dc voltage but also ac voltage. Microstructures including microchannels, sinusoidal surface profile microstructures, waveguide core, microlens array and binary Fresnel zone plate have been successfully… Show more

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Cited by 13 publications
(15 citation statements)
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“…Polymer patterning by instability under an electric field is a very common industrial‐friendly process 167a. Polymeric organo‐rods have been made by this process and have shown hydrophobicity and enhanced adhesion, mimicking the nanohairs of gecko.…”
Section: Surface Modification Through Patterningmentioning
confidence: 99%
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“…Polymer patterning by instability under an electric field is a very common industrial‐friendly process 167a. Polymeric organo‐rods have been made by this process and have shown hydrophobicity and enhanced adhesion, mimicking the nanohairs of gecko.…”
Section: Surface Modification Through Patterningmentioning
confidence: 99%
“…Polymeric organo‐rods have been made by this process and have shown hydrophobicity and enhanced adhesion, mimicking the nanohairs of gecko. [167b] Polymeric microlens can also be fabricated for optical devices . The resolution of the patterns obtained with electric‐field instability is limited due to the dielectric breakdown 167a,186.…”
Section: Surface Modification Through Patterningmentioning
confidence: 99%
See 1 more Smart Citation
“…However, up to now most of the reported EISF process adopted the completely conductive template (CCT) as the top electrode, that is, the patterned template consists of a conductive backboard and conductive protrusions (Fig. B(i)), which is usually made of metal, indium tin oxide (ITO), or conductive silicon . In this case, the electric breakdown is easy to happen due to the leaky current flowing from one electrode to the other via the dielectric polymer especially for a large electric field, leading to a failed formation, which is easy to be observed in the experiments and is seldom mentioned in the published literatures.…”
Section: Introductionmentioning
confidence: 99%
“…Although the direct diamond turning process is a one step process, due to process difficulty and expensive tooling, the fabrication process cost could be in the order of USD 100 -1000 /mm 2 . Presently, inkjet printing [29] and electrostatic-induced lithography [30] have been explored for direct fabrication of polymer-based shape controlled lenses. The large dead space between lenslets could be an issue in reducing the optical efficiency considerably.…”
Section: Introductionmentioning
confidence: 99%