Microstructure, mechanical and tribological properties of CrN/W2N multilayer films deposited by DC magnetron sputtering

Interface and superhardness of TiN/CNx multilayer films

“…For the sample deposited at 100°C, the Ti 2p spectrum could be fitted well with five components. The two peaks at 454.68 and 460.90 eV are attributed to the Ti 2p 3/2 and Ti 2p 1/2 electron binding energy of the TiN phase, in agreement with the others' reports attributed to the formation of nitride (N/Ti) [11]. At higher binding energies, two more phases co-exist, namely TiC (or TiCN) and TiO 2 .…”

“…During the last two decades, a new class of multilayer materials has emerged that exhibit extremely high hardness, making them very attractive for tribological applications [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17]. Among these multilayer films, the crystalline/amorphous TiN/CN x multilayer film is one of the important candidates for the next generation materials in hightemperature tribological applications and protective coatings for cutting tools [13][14][15][16][17], because it possesses qualities of super hardness.…”

Deposition and characterisation of Mo2N/CrN multilayer coatings prepared by cathodic arc evaporation

“…For the latter, the coating coefficient of friction and the wear rate show the minimum for bilayer thickness of about 3 nm, for which the maximum hardness was determined [42]. A similar effect was observed for CrN/W 2 N coating with bilayer thickness of 15 nm [41].…”

“…CrN-based multilayered films using magnetron sputtering, with reasonable properties, such as CrN/CrAlN [40], CrN/W 2 N [41], CrN/AlN [42], TiN/CrN [29], CrN/ZrN [43], CrN/Mo 2 N [11 -13] have been developed. Applying bilayer thickness on a nanometric scale the mechanical properties can be improved.…”

Microstructure and tribological behavior of multilayered CrN coating by arc ion plating

“…Another interpretation is that the hardness of the M-CrN coatings is enhanced. Therefore, the antidetachment behavior of wear debris of the M-CrN coatings is better than that of the conventional CrN coatings [37]. The mechanism proposed was supported by SEM work.…”