Microstructure of LiAl₅O₈ and LiAlO₂ Films Prepared by Laser CVD

Abstract

α-LiAl5O8, γ-LiAlO2, α-Al2O3and those composite films were prepared on AlN polycrystalline substrates by laser chemical vapor deposition (LCVD), and the effects of total pressure (Ptot) and the molar ratio of Li to Al (RLi/Al) on the morphology and deposition rates were investigated. The typical morphology of single-phase γ-LiAlO2films prepared atRLi/Al> 1.0 andPtot> 400 Pa was granular, whereas γ-LiAlO2films prepared atPtot< 200 Pa and γ-LiAlO2-α-LiAl5O8composite films had pyramidal grains. Single-phase α-LiAl5O8films showed polygonally faceted morphologies. Composite films of α-LiAl5O8and α-Al2O3consisted of carifllower-like and faceted grains. A single-phase γ-LiAlO2film deposited at 200 Pa showed the maximum deposition rate of 48 μm h-1.