2015
DOI: 10.1016/j.tsf.2015.01.058
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Microstructure of mixed oxide thin films prepared by magnetron sputtering at oblique angles

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Cited by 6 publications
(3 citation statements)
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“…This ion bombardment induces the ejection of material from the target onto a substrate located nearby. MS deposition gives rise to homogeneous films of controlled low metal loading and thickness, operates at room temperature, and it is easily scalable and quite reproducible [15][16][17][18][19]. The compactness of the deposited material with this technique can be tuned through deposition geometry, i.e., angle between the flux of sputtered particles from the target and substrate normal [19].…”
Section: Introductionmentioning
confidence: 99%
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“…This ion bombardment induces the ejection of material from the target onto a substrate located nearby. MS deposition gives rise to homogeneous films of controlled low metal loading and thickness, operates at room temperature, and it is easily scalable and quite reproducible [15][16][17][18][19]. The compactness of the deposited material with this technique can be tuned through deposition geometry, i.e., angle between the flux of sputtered particles from the target and substrate normal [19].…”
Section: Introductionmentioning
confidence: 99%
“…MS deposition gives rise to homogeneous films of controlled low metal loading and thickness, operates at room temperature, and it is easily scalable and quite reproducible [15][16][17][18][19]. The compactness of the deposited material with this technique can be tuned through deposition geometry, i.e., angle between the flux of sputtered particles from the target and substrate normal [19]. Thus, MS at oblique deposition angles (MS-OAD) renders mesoporous films with open microstructure (compared with normal deposition configuration that gives in general compact thin films [18]).…”
Section: Introductionmentioning
confidence: 99%
“…To prove this concept, we have designed and prepared a series of highly porous a-TiO 2 -based layered systems and correlate their photoactivity with the existence of light confinement effects for wavelengths around the onset of absorption of a-TiO 2 (i.e., ∼380 nm). These nanostructured multilayered systems have been manufactured by electron beam evaporation in an oblique angle configuration (OAD), , a procedure known to render columnar thin films with empty volume ratios up to 50%. We and other laboratories have applied this procedure to the fabrication of single photocatalytic layers of TiO 2 and other materials or the fabrication of dye-sensitized solar cells. , …”
Section: Introductionmentioning
confidence: 99%