SiC fibre with the transverse isotropic properties is very important to it reinforced metal matrix composites. In this paper, local texture of the CVD SiC fibre was investigated by means of X-ray diffraction (XRD) and precession electron diffraction (PED) on transmission electron microscopy (TEM). The result from XRD is in agreement with the result obtained from PED. And the result shown that at the first stage of deposition, the preferred direction of SiC grains is almost random and the distribution of grain size is scattered. At the second and third stages of deposition, there are two kinds of texture in SiC fibre, that is, (110),111. and (110),115.. Furthermore, the grain size at the second and third stages is about 200 nm and it is lower at the third stage than at the second stage because of the lower temperature at the third stage. The [110] preferred direction along axial direction for SiC fibre is beneficial to the axial tensile strength.