Microstructure Surface Topography Measurement Based on Color Images of White Light Interferometry

White light interferometer (WLI) is one of the common machines that are used to characterizing surface structures. The indication errors of WLI are key metrologic characteristics, which may affect evaluation result of WLI. In this paper, a two-dimensional micro/nano pitch (2D pitch) standard is introduced to calibrate the lateral indication error of WLI. The calibrating experiments are carried out in four measurement positions. The results and the uncertainty is anlysized. And the expanded uncertainty of WLI in lateral measurement (x50) is evaluated as tens of nanometer.

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Calibration of WLI Lateral Indication Error with 2D Micro/Nano Pitch Standard

Wei

Sun

Cai

2021

J. Phys.: Conf. Ser.

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Microstructure Surface Topography Measurement Based on Color Images of White Light Interferometry

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Calibration of WLI Lateral Indication Error with 2D Micro/Nano Pitch Standard

Calibration of WLI Lateral Indication Error with 2D Micro/Nano Pitch Standard

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