Microsystem Modeling

Korvink, Jan G.; Baltes, H.

doi:10.1002/1616-8984(199610)2:1<181::aid-seup181>3.0.co;2-a

Cited by 4 publications

(3 citation statements)

References 23 publications

(52 reference statements)

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“…When comparing (22) with (14) it is easy to see that the heat capacity matrix can be released by capacitor elements, the heat conductivity matrix by resistor elements and the heat source vector (matrix) by current sources. The equivalent thermal networks were derived for different types of finite elements [60].…”

Section: Methodsmentioning

confidence: 99%

“…It is possible to solve the Poisson equation for the unknown electric potential field, provided that the geometry of the heater, its specific conductivity and the boundary conditions are specified [22]. Note that (11) depends only implicitly on time, due to possible changes in boundary values or changes in conductivity.…”

Section: Coupling Of Heat Transfer Equation To Other Physical Domainsmentioning

confidence: 99%

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Dynamic electro-thermal simulation of microsystems—a review

Bechtold

Rudnyi

Korvink

2005

J. Micromech. Microeng.

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An overview of electro-thermal modeling of microsystems is presented. We consider the most important coupling between thermal and electrical phenomena, and then focus on the industry's central concern, that of Joule heating. A description of different solution approaches for the heat transfer partial differential equation, which constitutes the central part of electro-thermal simulation, is given. We briefly review the analytical solutions and consider further the numerical approaches, which are based on spatial discretization of the thermal domain. Lastly, we describe the final level of approximation, the dynamic compact thermal modeling. We emphasize the formal model order reduction methods, because they directly follow the spatial discretization, and thus preserve the investment into the finite element modeling.

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Section: Methodsmentioning

confidence: 99%

Section: Coupling Of Heat Transfer Equation To Other Physical Domainsmentioning

confidence: 99%

Dynamic electro-thermal simulation of microsystems—a review

Bechtold

Rudnyi

Korvink

2005

J. Micromech. Microeng.

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“…It is possible to solve Eqs (1) and (2) for the unknown electric potential field provided the geometry of the resistor, its conductivity (or the resistivity) that may depend on temperature and the boundary conditions are specified. 15 Note that Eqs (1) and (2) depend only implicitly on time due to a possible change in boundary values or a change in conductivity. This is because the speed of electron propagation is very high.…”

Section: Electro-thermal Processmentioning

confidence: 99%

Solid Propellant Microthruster: Theory of Operation and Modelling Strategy

Rudnyi¹,

Bechtold²,

Korvink³

et al. 2002

NanoTech 2002 - "At the Edge of Revolution"

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A modelling strategy for a microthruster array based on solid fuel is presented. We review the theory of operation of the microthruster that includes an electrothermal process, ignition, sustained combustion, membrane rupture and gas dynamics. The recommended level of theory is chosen to answer practical engineering questions, so as to make the recommended models feasible to develop and optimize. Special attention is paid to transferring the resulting models to existing software for electrical circuit simulation to permit the development of intelligent electrical driving circuits. The methods of automatic model reduction are presented and the most appropriate method for a microthruster array is chosen.

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State of the art in prediction of mechanical behaviour of microsystems [MEMS]

Lishchynska

Cordero

Slattery

5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, 2004. E

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Microsystem Modeling

Cited by 4 publications

References 23 publications

Dynamic electro-thermal simulation of microsystems—a review

Dynamic electro-thermal simulation of microsystems—a review

Solid Propellant Microthruster: Theory of Operation and Modelling Strategy

State of the art in prediction of mechanical behaviour of microsystems [MEMS]

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