Microvalves and Micropumps for BioMEMS

Au, Anthony K.; Lai, Hoyin; Utela, Ben; Folch, Albert

doi:10.3390/mi2020179

Cited by 294 publications

(206 citation statements)

References 117 publications

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“…There have been various types of on-chip pumps reported [4,5]. From the viewpoint of driving source, piezoelectric actuator has been frequently used [6][7][8].…”

Section: Introductionmentioning

confidence: 99%

A Peristaltic Pump Integrated on a 100% Glass Microchip Using Computer Controlled Piezoelectric Actuators

Tanaka¹

2014

Micromachines

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Lab-on-a-chip technology is promising for the miniaturization of chemistry, biochemistry, and/or biology researchers looking to exploit the advantages of a microspace. To manipulate fluid on a microchip, on-chip pumps are indispensable. To date, there have been several types of on-chip pumps including pneumatic, electroactive, and magnetically driven. However these pumps introduce polymers, metals, and/or silicon to the microchip, and these materials have several disadvantages, including chemical or physical instability, or an inherent optical detection limit. To overcome/avoid these issues, glass has been one of the most commonly utilized materials for the production of multi-purpose integrated chemical systems. However, glass is very rigid, and it is difficult to incorporate pumps onto glass microchips. This paper reports the use of a very flexible, ultra-thin glass sheet (minimum thickness of a few micrometers) to realize a pump installed on an entirely glass-based microchip. The pump is a peristaltic-type, composed of four serial valves sealing a cavity with two penetrate holes using ultra-thin glass sheet. By this pump, an on-chip circulating flow was demonstrated by directly observing fluid flow, visualized via polystyrene tracking particles. The flow rate was proportional to the pumping frequency, with a maximum flow rate of approximately 0.80 μL/min. This on-chip pump could likely be utilized in a wide range of applications which require the stability of a glass microchip.

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“…There have been various types of on-chip pumps reported [4,5]. From the viewpoint of driving source, piezoelectric actuator has been frequently used [6][7][8].…”

Section: Introductionmentioning

confidence: 99%

A Peristaltic Pump Integrated on a 100% Glass Microchip Using Computer Controlled Piezoelectric Actuators

Tanaka¹

2014

Micromachines

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“…A great number of principles and techniques is used to build microactuators [6][7][8] . They include piezoelectric 9,10 , electrostatic 11,12 , thermal [13][14][15] , electrokinetic 16,17 and many other actuation principles.…”

Section: Introductionmentioning

confidence: 99%

Electrochemical membrane microactuator with a millisecond response time

Uvarov

Lokhanin

Постников

et al. 2018

Sensors and Actuators B: Chemical

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Lack of fast and strong actuators to drive microsystems is well recognized. Electrochemical actuators are considered attractive for many applications but they have long response time (minutes) due to slow gas termination. Here an electrochemical actuator is presented for which the response time can be as short as 1ms. The alternating polarity water electrolysis is used to drive the device. In this process only nanobubbles are formed. The gas in nanobubbles can be terminated fast due to surface assisted reaction between hydrogen and oxygen that happens at room temperature. The working chamber of the actuator contains concentric titanium electrodes; it has a diameter of 500 µm and a height of 8 µm. The chamber is sealed by a polydimethylsiloxane (PDMS) membrane of 30µm thick. The device is characterized by an interferometer and a fast camera. Cyclic operation at frequency up to 667 Hz with a stroke of about 30% of the chamber volume is demonstrated. The cycles repeat themselves with high precision providing the volume strokes in picoliter range. Controlled explosions in the chamber can push the membrane up to 90 µm.

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“…In recent years, microfluidic devices have begun to receive a great deal of attention [1][2][3][4]. Such structures can perform conventional laboratory analyses with significant practical advantages.…”

Section: Introductionmentioning

confidence: 99%

Nonlinear Dual-Phase Multiplexing in Digital Microfluidic Architectures

et al. 2011

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A 16 × 16 digital microfluidic multiplexer is demonstrated. The device makes use of dual-phase AC activation in a bi-layered electrode structure for actuating microdrops independently. A switching arrangement is employed to localize two out-of-phase AC waveforms in one overlapped region of the two-dimensional multiplexer grid. The superimposed AC waveforms overcome the threshold voltage for motion of a local microdrop. The demonstrated dual-phase activation and nonlinear threshold-based motion overcomes the previously-reported microdrop interference effect, as it successfully actuates individual microdrops in systems with multiple neighbouring microdrops. The device is demonstrated with an integrated centre-tap transformer using a 10.0 V rms input voltage and minimal power consumption.

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Microvalves and Micropumps for BioMEMS

Cited by 294 publications

References 117 publications

A Peristaltic Pump Integrated on a 100% Glass Microchip Using Computer Controlled Piezoelectric Actuators

A Peristaltic Pump Integrated on a 100% Glass Microchip Using Computer Controlled Piezoelectric Actuators

Electrochemical membrane microactuator with a millisecond response time

Nonlinear Dual-Phase Multiplexing in Digital Microfluidic Architectures

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