Microwave and hot filament chemical vapour deposition of diamond multilayers on Si and WC–Co substrates

Kadlečíková, Magdaléna; Vojs, Marián; Breza, Juraj; Veselý, M.; Frgala, Zdeněk; Michalka, M.; Matjková, J.; Vojačková, A.; Daniš, T.; Marton, Marián

doi:10.1016/j.mejo.2006.10.006

Cited by 7 publications

(4 citation statements)

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“…17,18 This type of structure is reported to appear when using lowenergy sources or a strong accelerating bias perturbing diamond growth. 19 On the other hand, evidence of cauliflower structures in the first stages of microcrystalline diamond deposition has also been reported. 20 The few published studies on the influence of substrate temperature on diamonds growth indicate that low temperatures lead to the deposition of cauliflower morphology 21 at a given pressure.…”

Section: ■ Experimental Results and Discussionmentioning

confidence: 99%

“…These observations are in agreement with those reported in the literature, indicating that the morphology of a CVD deposited diamond film (well-faceted, presence of small facets and cauliflowers) is deeply influenced by the process parameters. Usually the formation of a cauliflower structure is related to the use of high CH 4 /H 2 ratio regardless of the type of deposition source. , This type of structure is reported to appear when using low-energy sources or a strong accelerating bias perturbing diamond growth . On the other hand, evidence of cauliflower structures in the first stages of microcrystalline diamond deposition has also been reported …”

Section: Experimental Results and Discussionmentioning

confidence: 99%

See 1 more Smart Citation

Carbon Structures Grown by Direct Current Microplasma: Diamonds, Single-Wall Nanotubes, and Graphene

et al. 2014

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Plasma assisted CVD is now an established technique for the growth of a variety of dielectrics and semiconductors. The versatility of an in-house developed direct-current (dc) microplasma deposition system is demonstrated here for the growth of a wide range of carbon-based materials. Diamond, nanodiamond, nanocrystalline graphite, single-wall carbon nanotubes, and few-layer graphene have been deposited using the same dc microplasma deposition system using 0.5% CH4/H2 gas feed, but changing only the substrate temperature (in the range 500−1150 °C) and the total pressure (0.3−200 Torr). The different structures have been characterized by scanning electron microscopy and micro-Raman spectroscopy. The experimental data have been interpreted from a thermodynamic point of view by applying a nonequilibrium nondissipative model. Nonequilibrium phase diagrams are presented and compared to the experimental data to provide a wide-ranging interpretation scenario

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Section: ■ Experimental Results and Discussionmentioning

confidence: 99%

Section: Experimental Results and Discussionmentioning

confidence: 99%

Carbon Structures Grown by Direct Current Microplasma: Diamonds, Single-Wall Nanotubes, and Graphene

et al. 2014

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“…Diamond multilayers were already grown on cemented carbide substrates aiming improvements in the cutting tools performance [13][14][15][16][17]. Sun et al achieved an upgrade on the working lifetime of drawing dies by a factor of above 15, compared to uncoated ones [16].…”

Section: Introductionmentioning

confidence: 99%

Self-mated tribological systems based on multilayer micro/nanocrystalline CVD diamond coatings

Salgueiredo¹,

Abreu²,

Amaral³

et al. 2013

Wear

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The tribological response of multilayer micro/nanocrystalline diamond coatings grown by the hot filament CVD technique is investigated. These multigrade systems were tailored to comprise a starting microcrystalline diamond (MCD) layer with high adhesion to a silicon nitride (Si3N4) ceramic substrate, and a top nanocrystalline diamond (NCD) layer with reduced surface roughness. Tribological tests were carried out with a reciprocating sliding configuration without lubrication. Such composite coatings exhibit a superior critical load before delamination (130 -200 N), when compared to the mono-(60-100 N) and bilayer coatings (110 N), considering ∼10 mm thick films. Regarding the friction behaviour, a short-lived initial high friction coefficient was followed by low friction regimes (friction coefficients between 0.02 and 0.09) as a result of the polished surfaces tailored by the tribological solicitation. Very mild to mild wear regimes (wear coefficient values between 4.1 10 −8 and 7.7 10 −7 mm 3 N −1 m −1 ) governed the wear performance of the self-mated multilayer coatings when subjected to highload short-term tests (60-200 N; 2 h; 86 m) and medium-load endurance tests (60 N; 16 h; 691 m).

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“…The main reason for this attention is that NCD films have a low surface roughness [1] while retaining bulk diamond mechanical properties and are used in a diverse array of applications from tribology [2] to machining [3], with advantages such as a low wear and friction coefficient [4] and a significant reduction in cutting forces [2] when used as coatings in applications such as machining [5], dental [6] and drilling [7]. NCD can be deposited using chemical vapor deposition techniques, mainly microwave plasma CVD [8,9] and hot filament chemical vapor deposition (HFCVD) [9][10][11].…”

Section: Introductionmentioning

confidence: 99%

Surface morphology and bond characterization of nanocrystalline diamonds grown on tungsten carbide via hot filament chemical vapor deposition

Hamzah

Yong

Yajid

2013

Journal of Crystal Growth

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Microwave and hot filament chemical vapour deposition of diamond multilayers on Si and WC–Co substrates

Cited by 7 publications

References 4 publications

Carbon Structures Grown by Direct Current Microplasma: Diamonds, Single-Wall Nanotubes, and Graphene

Carbon Structures Grown by Direct Current Microplasma: Diamonds, Single-Wall Nanotubes, and Graphene

Self-mated tribological systems based on multilayer micro/nanocrystalline CVD diamond coatings

Surface morphology and bond characterization of nanocrystalline diamonds grown on tungsten carbide via hot filament chemical vapor deposition

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