Microwave-based characterization of an atmospheric pressure microwave-driven plasma source for surface treatment

Rackow, K.; Ehlbeck, Jörg; Krohmann, Udo; Baeva, M.

doi:10.1088/0963-0252/20/3/035019

Cited by 10 publications

(3 citation statements)

References 10 publications

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“…To get a better understanding of the electrical field distribution, simulations of the electric field distribution as well as Eigenmode analysis with the commercially available simulation software COMSOL Multiphysics were conducted. Modeling and simulations of electrical field distributions of atmospheric pressure microwave plasma torches provided already detailed insights and led to further developments and improvements regarding for example their ignition or operation behavior [19][20][21][22] .…”

Section: Representative Resultsmentioning

confidence: 99%

How to Ignite an Atmospheric Pressure Microwave Plasma Torch without Any Additional Igniters

Leins

Gaiser

Schulz

et al. 2015

JoVE

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This movie shows how an atmospheric pressure plasma torch can be ignited by microwave power with no additional igniters. After ignition of the plasma, a stable and continuous operation of the plasma is possible and the plasma torch can be used for many different applications. On one hand, the hot (3,600 K gas temperature) plasma can be used for chemical processes and on the other hand the cold afterglow (temperatures down to almost RT) can be applied for surface processes. For example chemical syntheses are interesting volume processes. Here the microwave plasma torch can be used for the decomposition of waste gases which are harmful and contribute to the global warming but are needed as etching gases in growing industry sectors like the semiconductor branch. Another application is the dissociation of CO 2 . Surplus electrical energy from renewable energy sources can be used to dissociate CO 2 to CO and O 2 . The CO can be further processed to gaseous or liquid higher hydrocarbons thereby providing chemical storage of the energy, synthetic fuels or platform chemicals for the chemical industry. Applications of the afterglow of the plasma torch are the treatment of surfaces to increase the adhesion of lacquer, glue or paint, and the sterilization or decontamination of different kind of surfaces. The movie will explain how to ignite the plasma solely by microwave power without any additional igniters, e.g., electric sparks. The microwave plasma torch is based on a combination of two resonators -a coaxial one which provides the ignition of the plasma and a cylindrical one which guarantees a continuous and stable operation of the plasma after ignition. The plasma can be operated in a long microwave transparent tube for volume processes or shaped by orifices for surface treatment purposes. Video LinkThe video component of this article can be found at

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Section: Representative Resultsmentioning

confidence: 99%

How to Ignite an Atmospheric Pressure Microwave Plasma Torch without Any Additional Igniters

Leins

Gaiser

Schulz

et al. 2015

JoVE

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“…The ignition pin is an axially symmetrical resonator, see figure 1 developed in [32]. The same pin structure has been used in [1,34]. A quartz tube, 55 mm external diameter, protects the conductive walls of the chamber from plasma attachment.…”

Section: Methodsmentioning

confidence: 99%

“…The electric field of MWs builds maxima and minima along the process chamber. The configuration of the electric field can be predicted by means of standard calculations [34]. The ignition pin is placed slightly below a maximum in a such way that the strength of the electric field is sufficient for plasma ignition and after ignition the plasma should move toward the field maximum, i.e.…”

Section: Stability Of the Ignitionmentioning

confidence: 99%

Observation of microwave volume plasma ignition in ambient air

Pipa¹,

Andrasch²,

Rackow³

et al. 2012

Plasma Sources Sci. Technol.

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A pulsed microwave (MW) plasma was maintained in a waveguide with an ignition pin. Images of the MW discharge were recorded during ignition in ambient air with millisecond time resolution and correlated with measurements of absorbed MW power. This work is focused on the quantification of ignition stability and observation of the plasma structure. Additionally, a time-and space-integrated emission spectrum in the range 220-770 nm is presented.

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Growth of Bulk GaN from Gas Phase

Siche

Zwierz

2018

Crystal Research and Technology

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The present status of the GaN bulk growth by vapor growth methods is reviewed and is shortly classified into all methods with bulk growth potential. The hydride vapor phase epitaxy (HVPE) as the most developed and already commercialized method using chlorine as transport agent was frequently reviewed before. However, it does not yield true bulk GaN, suffers from perfection limiting heteroepitaxy, direction depending growth rate, parasitic growth and by‐product formation, the latter both limiting the process duration. Therefore, in this review other methods are considered. Alternative transport agents are pronounced, like iodine, hydrogen, oxygen, water and the pseudo halide CN− ‐ ion, which are not able to reveal potential for bulk growth. These mostly less successful approaches, are sometimes repeated, because not adequately published.

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Microwave-based characterization of an atmospheric pressure microwave-driven plasma source for surface treatment

Cited by 10 publications

References 10 publications

How to Ignite an Atmospheric Pressure Microwave Plasma Torch without Any Additional Igniters

How to Ignite an Atmospheric Pressure Microwave Plasma Torch without Any Additional Igniters

Observation of microwave volume plasma ignition in ambient air

Growth of Bulk GaN from Gas Phase

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