2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) 2024
DOI: 10.1109/uffc-js60046.2024.10794127
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Microwave Characterization of HfO2/ZrO2 superlattice MFM varactors integrated into BEoL

Sukhrob Abdulazhanov,
Quang Huy Le,
David Lehninger
et al.
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