Microwave inductive proximity sensors with sub-pm/Hz1/2 resolution

Matheoud, Alessandro Valentino; Solmaz, Nergiz Şahin; Frehner, Lénaïc; Boero, Giovanni

doi:10.1016/j.sna.2019.05.041

Cited by 8 publications

(6 citation statements)

References 31 publications

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“…There are many types of sensors that can detect the proximity of a physical object. Proximity sensors use many physical properties, such as light reflection [ 23 , 24 , 25 , 26 ], sound wave reflection [ 27 , 28 , 29 , 30 , 31 ], reflection of an electromagnetic wave in the radar [ 32 , 33 , 34 ], and also detecting changes in the selected parameter in the space around the sensor, such as electric permeability [ 35 , 36 , 37 , 38 , 39 ], magnetic permeability [ 38 ], or temperature [ 25 ].…”

Section: Related Researchmentioning

confidence: 99%

Human Body Parts Proximity Measurement Using Distributed Tactile Robotic Skin

Klimaszewski

Władziński

2021

Sensors

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Safety in human–machine cooperation is the current challenge in robotics. Safe human–robot interaction requires the development of sensors that detect human presence in the robot’s workspace. Detection of this presence should occur before the physical collision of the robot with the human. Human to robot proximity detection should be very fast, allowing machine elements deceleration to velocities safe for human–machine collision. The paper presents a new, low-cost design of distributed robotic skin, which allows real-time measurements of the human body parts proximity. The main advantages of the proposed solution are low cost of its implementation based on comb electrodes matrix and real-time operation due to fast and simple electronic design. The main contribution is the new idea of measuring the distance to human body parts by measuring the operating frequency of a rectangular signal generator, which depends on the capacity of the open capacitor. This capacitor is formed between the comb electrodes matrix and a reference plate located next to the matrix. The capacitance of the open capacitor changes if a human body part is in vicinity. The application of the developed device can be very wide. For example, in the field of cooperative robots, it can lead to the improvement of human–machine interfaces and increased safety of human–machine cooperation. The proposed construction can help to meet the increasing requirements for cooperative robots.

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Section: Related Researchmentioning

confidence: 99%

Human Body Parts Proximity Measurement Using Distributed Tactile Robotic Skin

Klimaszewski

Władziński

2021

Sensors

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“…In theory, any long-range interactions between the sensor and the object can be developed to construct proximity sensors. Such interactions arise, at least, from electrostatic and magnetic inductions, microwave induction, (ultra)sonic action, detection of visual , and infrared lights, humidity, , and temperature, , among which electrostatic inductive proximity sensing is extensively investigated owing to its versatility, compatibility, and ease of integration with current mainstream electronics. Electrostatic inductive sensing is based on the electrostatic interaction between a charged object and a sensor, where the charged object widely exists in both our daily lives and industrial fields, and it is also convenient to charge an electrically neutral object by, for example, triboelectrification. , Electrostatic induction can be observed by proximity sensors according to the inductive changes in their voltage, current, resistance, and capacitance.…”

Section: Introductionmentioning

confidence: 99%

Ferroelectric Polarization Enhancement of Proximity Sensing Performance in Oxide Semiconductor Field-Effect Transistors

Liu

Dong

Chen

et al. 2020

ACS Appl. Electron. Mater.

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The explosive development of Internet of Things and wearable electronics greatly promotes the exploitation of diverse sensors in which noncontact proximity sensing is of great significance to perceive diverse information from the environment and human bodies with no need for physical contact. In theory, any long-range interactions can be developed to realize proximity sensing function. In recent years, organic field-effect transistor-based proximity sensors have been realized in which a charged object can be regarded as a gate to modulate transistor’s drain current. However, the low-carrier mobility and shift of threshold voltage in organic transistors limited their sensing performance. Herein, we reported a ferroelectric-polarization-enhanced oxide semiconductor transistor proximity sensor. The polarization state in the ferroelectric layer was well modulated by poling pulse with different widths. Therefore, the optimal operation point of the transistor sensor was precisely controlled by the ferroelectric-polarization-induced shift of the threshold voltage. Such a ferroelectric-modulated oxide semiconductor transistor showed obvious sensing performance to the approach of several common charged objects and presented a much larger current response than that from organic transistor sensors. As an extended application, two transistor sensors were configured to realize the velocity measurement of a charged object.

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Section: Introductionmentioning

confidence: 99%

“…CMOS-based inductive sensing has been applied to proximity sensing [11,12,13], magnetic biosensing [14], and tactile sensing [15]. The sensing inductors in these studies were either on-chip CMOS inductors [12,13,14], on-chip electroplated inductors [11], or off-chip printed circuit board (PCB) inductors [12,13]. The readout circuits were custom-designed on-chip CMOS circuitry [11,12,13,15] or a commercially available off-chip inductance conversion integrated circuit (IC) [14].…”

Section: Introductionmentioning

confidence: 99%

“…The sensing inductors in these studies were either on-chip CMOS inductors [12,13,14], on-chip electroplated inductors [11], or off-chip printed circuit board (PCB) inductors [12,13]. The readout circuits were custom-designed on-chip CMOS circuitry [11,12,13,15] or a commercially available off-chip inductance conversion integrated circuit (IC) [14]. All of the above sensors are some forms of proximity sensors, i.e., they detect the distance between the sensing coil and another conducting or ferromagnetic object while the sensing coil remains fixed and undeformed.…”

Section: Introductionmentioning

confidence: 99%

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A Robust Fully-Integrated Digital-Output Inductive CMOS-MEMS Accelerometer with Improved Inductor Quality Factor

2019

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This paper presents the design, fabrication, and characterization of an inductive complementary metal oxide semiconductor micro-electromechanical systems (CMOS-MEMS) accelerometer with on-chip digital output based on LC oscillators. While most MEMS accelerometers employ capacitive detection schemes, the proposed inductive detection scheme is less susceptible to the stress-induced structural curling and deformation that are commonly seen in CMOS-MEMS devices. Oscillator-based frequency readout does not need analog to digital conversion and thus can simplify the overall system design. In this paper, a high-Q CMOS inductor was connected in series with the low-Q MEMS sensing inductor to improve its quality factor. Measurement results showed the proposed device had an offset frequency of 85.5 MHz, sensitivity of 41.6 kHz/g, noise floor of 8.2 mg/√Hz, bias instability of 0.94 kHz (11 ppm) at an average time of 2.16 s, and nonlinearity of 1.5% full-scale.

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Microwave inductive proximity sensors with sub-pm/Hz1/2 resolution

Cited by 8 publications

References 31 publications

Human Body Parts Proximity Measurement Using Distributed Tactile Robotic Skin

Human Body Parts Proximity Measurement Using Distributed Tactile Robotic Skin

Ferroelectric Polarization Enhancement of Proximity Sensing Performance in Oxide Semiconductor Field-Effect Transistors

A Robust Fully-Integrated Digital-Output Inductive CMOS-MEMS Accelerometer with Improved Inductor Quality Factor

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