2008
DOI: 10.1109/led.2008.2001635
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Microwave ZnO Thin-Film Transistors

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Cited by 86 publications
(51 citation statements)
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“…However, so far, mobility in precursor-route ZnO still falls short of the performance of ZnO when deposited by methods such as magnetron sputtering or pulsed laser deposition [8][9][10][11].…”
Section: Physical Chemistry Chemical Physics Accepted Manuscriptmentioning
confidence: 99%
“…However, so far, mobility in precursor-route ZnO still falls short of the performance of ZnO when deposited by methods such as magnetron sputtering or pulsed laser deposition [8][9][10][11].…”
Section: Physical Chemistry Chemical Physics Accepted Manuscriptmentioning
confidence: 99%
“…With a wide direct bandgap of ~3.4eV at room temperature, ZnO has been regarded as an excellent semiconductor material for UV detection and possesses an absorption profile that compliments many organic semiconductors. ZnO can be easily deposited at room-or relatively low temperatures to form thin layers by standard techniques such as sputtering [6], atomic-layer deposition [7] and pulsed-laser deposition [8]. The electron mobility is generally limited by surface roughness and carrier scatterings at grain boundaries; however, the electron mobility in ZnO has been demonstrated to reach up to 110cm 2 /Vs, when using an elevated substrate temperature during the growth step [9].…”
Section: Introductionmentioning
confidence: 99%
“…In addition to transparency in visible range, they have superior electron mobility and better stability than a-Si:H TFTs [4][5][6][7], which has been the dominant device for flex electronics and flex displays [8]. Higher mobility directly translates into faster performance showing promise for even RFID tags [9]. Several AOS like Indium zinc oxide (IZO) [4], Indium Gallium Zinc Oxide [10] and Zinc Tin Oxide [11] have been reported and studied.…”
Section: Introductionmentioning
confidence: 99%