Single mode beam delivery in the mid-infrared spectral range 5.1-10.5 μm employing flexible hollow glass waveguides of 15 cm and 50 cm lengths, with metallic/dielectric internal layers and a bore diameter of 200 μm were demonstrated. Three quantum cascade lasers were coupled with the hollow core fibers. For a fiber length of 15 cm, we measured losses down to 1.55 dB at 5.4 μm and 0.9 dB at 10.5 μm. The influence of the launch conditions in the fiber on the propagation losses and on the beam profile at the waveguide exit was analyzed. At 10.5 µm laser wavelength we found near perfect agreement between measured and theoretical losses, while at ~5 µm and ~6 µm wavelengths the losses were higher than expected. This discrepancy can be explained considering an additional scattering loss effect, which scales as 1/λ 2 and is due to surface roughness of the metallic layer used to form the high-reflective internal layer structure of the hollow core waveguide. 37(9), 2454-2458 (1998). 10. J. Kriesel, G. M. Hagglund, N. Gat, V. Spagnolo, and P. Patimisco, "Spatial mode filtering of mid-infrared (mid-IR) laser beams with hollow core fiber optics," Proc. SPIE 8993, 89930V (2014). 11. https://www.thorlabs.com/newgrouppage9.cfm?objectgroup_id=7062#SingleMode.