2012
DOI: 10.1364/oe.20.029361
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Mid-infrared photonic crystal waveguides in silicon

Abstract: Abstract:We demonstrate the design, fabrication and characterization of mid-infrared photonic crystal waveguides on a silicon-on-insulator platform, showing guided modes in the wavelength regime between 2.9 and 3.9 µm. The characterization is performed with a proprietary intra-cavity Optical Parametric Oscillator in a free space optical setup and with a fibre coupled setup using a commercial Quantum Cascade Laser. We discuss the use of an integrated Mach-Zehnder interferometer for dispersion measurements and r… Show more

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Cited by 57 publications
(31 citation statements)
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“…Silicon-on-insulator [5,8,[40][41][42][43] 4.3 0.2 (3.8 μm) [9] Silicon-on-insulator (multi-mode) [9] 6.7 Silicon-on-porous silicon [5] 6.7 3.9 (3.39 μm) [ [38] 4.3 20 (10.6 μm) [38] a…”
Section: Siliconmentioning
confidence: 99%
“…Silicon-on-insulator [5,8,[40][41][42][43] 4.3 0.2 (3.8 μm) [9] Silicon-on-insulator (multi-mode) [9] 6.7 Silicon-on-porous silicon [5] 6.7 3.9 (3.39 μm) [ [38] 4.3 20 (10.6 μm) [38] a…”
Section: Siliconmentioning
confidence: 99%
“…The details of the measurement setup are discussed in [9], to which only two changes were made. Firstly, the source now consists of a tunable quantum cascade laser (tuning range: 3725 nm -3895nm) from Daylight Solutions which was used also in [10,11] and secondly instead of butt coupling to the waveguide structures vertical coupling is used. The designs and corresponding measurements are discussed in the following sub-sections.…”
Section: Spectrometer Design and Measurementsmentioning
confidence: 99%
“…Towards mid-IR applications, different types of Group IV waveguides have been reported recently, based on silicon-on-insulator (SOI) [191][192][193], silicon-on-sapphire [142,194,195], silicon-on-porous-silicon [192], siliconon-nitride [196,197], suspended membrane silicon [198], silicon pedestal [199], and germanium-on-silicon [200]. Most of the waveguides are not aimed specifically at nonlinear applications, and little attention has been paid to dispersion engineering [196].…”
Section: Devicesmentioning
confidence: 99%