Mid-spatial frequency removal on aluminum free-form mirror

Li, Hongyu; Walker, David D.; Zheng, Xiao; Su, Xing; Wu, Lunzhe; Reynolds, Christina; Yu, Guoyu; Li, Tony; Zhang, Peng

doi:10.1364/oe.27.024885

Cited by 20 publications

(4 citation statements)

References 15 publications

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“…Figure 9 shows the process of finding the optimal path spacing. To evaluate the MSF error, some scholars have introduced different metrics, such as RMS value [31], PSD [32], and peak-to-valley (PV) value [33]. In this process, the RMS is used to evaluate the MSF error, and the maximum path spacing that satisfies the desired RMS is found through the iterative decrease in the path spacing step by step so that the polishing efficiency can be improved under the premise that the MSF error is effectively controlled.…”

Section: Path Spacing Optimization Methodsmentioning

confidence: 99%

Research on the Influence of the Material Removal Profile of a Spherical Polishing Tool on the Mid-Spatial Frequency Errors of Optical Surfaces

He,

Hai,

et al. 2024

Micromachines

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Elastic spherical polishing tools effectively conform to the polishing surface and exhibit high efficiency in the removal of materials, so they are extensively used in the sub-aperture polishing stages of optical components. However, their processing is often accompanied by significant mid-spatial frequency (MSF) errors, which critically degrade the performance of optical systems. To suppress the MSF errors generated during polishing with spherical tools, this study investigates the influence factor of MSF errors during the polishing process through an analysis of the convolution effect in material removal. A material removal profile model is established, and a uniform removal simulation is conducted to assess the influence of different shape material removal profiles on MSF errors. Simulation and experimental results show that a Gaussian-like shape material removal profile is more effective in suppressing the MSF errors during polishing compared to the “W” and trapezoidal shape material removal profiles. In addition, based on the characteristics of the RMS decreasing in a serrated trend with the decrease in path spacing, a path spacing optimization method considering the polishing efficiency is proposed to improve the polishing efficiency while controlling the MSF errors, and the effectiveness of the path spacing optimization method is verified by comparing the MSF error at the maximum theoretical path spacing and the path spacing that is less than this. Finally, the path spacing optimization method is used to polish single-crystal silicon to further illustrate its practicality.

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Section: Path Spacing Optimization Methodsmentioning

confidence: 99%

Research on the Influence of the Material Removal Profile of a Spherical Polishing Tool on the Mid-Spatial Frequency Errors of Optical Surfaces

He,

Hai,

et al. 2024

Micromachines

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“…Industrial robots can better meet the requirements of low cost and simple control of the bonnet polishing technology. [7][8][9] The bonnet polishing system based on industrial robot has been widely studied. Ji et al 10 established a robotic polishing system based on bonnet polishing technology, and analyzed the position and posture control problems of bonnet polishing tool.…”

Section: Introductionmentioning

confidence: 99%

“…Industrial robots can better meet the requirements of low cost and simple control of the bonnet polishing technology. 7–9…”

Section: Introductionmentioning

confidence: 99%

Optimization of static performance for robot polishing system based on work stiffness evaluation

Pan

Zhu

Wang

et al. 2022

Proceedings of the Institution of Mechanical Engineers, Part B:

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Robot-assisted bonnet polishing system (RABPS) is widely used in the polishing of optical components due to its low cost, high efficiency and rapid polishing. However, due to the insufficient stiffness of the robot, it is easy to produce vibration in the machining process, which not only causes the size of the polishing contact area to deviate from the ideal value, but also affects the removal amount of workpiece. First, this paper analyzes the influence of robot system stiffness on the actual polishing area size and polishing removal. Next, based on the analysis of the technical characteristics of multiple groups of polishing posture corresponding to the same point of robot bonnet polishing, the optimization method of robot static stiffness performance is proposed. Finally, the correctness and efficiency of the optimization method are validated by simulation and experiment. The working stiffness of the robot increases by 26.8% and the roughness of the polished surface is improved by 42.9% after posture optimization.

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“…Zhao et al investigated a six-directional pseudorandom consecutive unicursal polishing path and validated the processed work piece, which had a significantly lower MSF error [25]. Some other polishing paths, such as the 'hyper-crossing' tool-path, which crosses itself, can be used to minimize MSFs in Computer Numerical Control (CNC) precession bonnet-polishing [26]. The planning of the tool path is beneficial for minimizing dimensional errors [27], which determine the focusing properties and optical transfer function of optical components that directly affect the surface profile.…”

Section: Introductionmentioning

confidence: 99%

Pseudo-random Path Generation Algorithms and Strategies for the Surface Quality Improvement of Optical Aspherical Components

Zha

Zhang

et al. 2020

Materials

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This study proposes two path generation algorithms to diminish the superposition of the convolution effect on the polishing path in computer-controlled optical surfacing. According to the polishing of aluminum-alloy based hyperboloid optical components, different proportions of polishing agents were blended. Then, the surface roughness of the optical components were determined through a validation experiment of the algorithms. Furthermore, the relationship between surface roughness and the polishing agent concentration, and the compensation strategies for surface roughness were analyzed. The results show that the two algorithms effectively compensated for surface waviness. The findings support the strategies for improving the surface quality of optical components with aspherical surfaces.

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Mid-spatial frequency removal on aluminum free-form mirror

Cited by 20 publications

References 15 publications

Research on the Influence of the Material Removal Profile of a Spherical Polishing Tool on the Mid-Spatial Frequency Errors of Optical Surfaces

Research on the Influence of the Material Removal Profile of a Spherical Polishing Tool on the Mid-Spatial Frequency Errors of Optical Surfaces

Optimization of static performance for robot polishing system based on work stiffness evaluation

Pseudo-random Path Generation Algorithms and Strategies for the Surface Quality Improvement of Optical Aspherical Components

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