In recent decades, metal halide perovskites
have attracted much
attention after showing great potential in photovoltaic (PV) applications.
With the rapid progress of perovskites, various thin-film fabrication
methods have been studied intensively. However, a film deposition
method with controllability, cost efficiency, scalability, and uniformity
is required to obtain perovskite films with the desired morphologies
and properties and achieve large-scale manufacture. Chemical vapor
deposition (CVD) stands out among the various deposition methods because
of its unique advantages. In this review, perovskite films for PV
applications deposited by diverse CVD methods are discussed, and a
summary of the development and investigation of CVD processes utilized
is provided.