Abstract-This paper proposes a direct method for the extraction of empirical-behavioral hybrid models using adaptive sampling. The empirical base is responsible for the functionality over a wide range of variables, especially in the extrapolation range. The behavioral part corrects for the errors of the empirical part in the region of particular interest, thus, it improves the accuracy in the desired region. Employment of response surface methodology and adaptive sampling allows full automation of the hybrid model extraction and assures its compactness. We used this approach to build a hybrid model composed of a robust empirical model available in CAD tools and a Radial Basis Functions interpolation model with Gaussian basis function. We extracted the hybrid model from measurements of a 0.15 µm GaAs HEMT and compared it to the pure behavioral and pure empirical models. The hybrid model yields higher accuracy while maintaining extrapolation capabilities. Additionally, the extraction time of the hybrid model is relatively low and we show that a good accuracy level can be achieved with a small number of measurements.