Millimeter-Wave Tunable Phase Shifter on Silicon-on-Glass Technology

Abstract

A low-loss, low-cost, and compact fully-dielectric phase shifter integrated on the corrugated Silicon-On-Glass (SOG) platform is presented for the first time. In the corrugated SOG platform, the glass substrate below the high-resistivity silicon (Si) components is etched in a periodic configuration to reduce the insertion loss and enhance the field confinement inside the Si. Measured phase shifts of 111 and 129 are achieved by a device length of 5 mm at the frequencies of 85 and 100 GHz, respectively. At 88 GHz, the maximum insertion loss over a phase shift of 114 is only 0.6 dB.Index Terms-Dielectric waveguide, passive components/circuits, phase shifter.

Millimeter-wave Wireless Integrated Systems: what to expect for future solutions

“…Several technologies have been used to develop passive phase shifters at mm-waves, including CMOS/BiCMOS, BST, Liquid Crystal, dielectric and MEMS. The passive phase shifters presented in the literature are either small with high losses [31], [32] or large with low losses [33], [34], [35]. Semiconductor-based components (varactor diodes, MOS varactors, FET switches and pin diodes) can be considered as tuning elements, but their quality factor at mmW is still poor.…”