Miniature fourier transform spectrometers based on electrothermal MEMS mirrors with large piston scan range

Xie, Huikai; Lan, Shuo; Wang, D.; Wang, W.; Sun, Jingjing; Liu, H.; Cheng, Jin; Ding, Jianrui; Qin, Zhihai; Chen, Q.; Kang, Huifang; Zhang, Tian

doi:10.1109/icsens.2015.7370315

Cited by 9 publications

(6 citation statements)

References 12 publications

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“…FTIR spectrometers that utilize MEMS are cost effective, portable and lightweight. [23][24][25][26] However, commercial MEMS-FTIR spectrometers typically possess a much shorter spectral bandwidth (∼1.1 to 2.5 μm), 23 capture light from a single point (typically through an optical fiber), and integration with pre-assembled wide-field imaging systems can be challenging. Diffraction grating-based spectrometers provide high performance and present the gold standard for spectroscopic analysis in a myriad of systems.…”

Section: Comparison To Other Spectroscopic Techniquesmentioning

confidence: 99%

Automated real-time spectral characterization of phase-change tunable filters using a linear variable filter and IR camera for wide-field MWIR imaging

et al. 2021

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Actively tunable optical filters based on chalcogenide phase-change materials (PCMs) are an emerging technology with applications across chemical spectroscopy and thermal imaging. The refractive index of an embedded PCM thin film is modulated through an amorphous-to-crystalline phase transition induced through thermal stimulus. Performance metrics include transmittance, passband center wavelength (CWL), and bandwidth; ideally monitored during operation (in situ) or after a set number of tuning cycles to validate real-time operation. Measuring these aforementioned metrics in real-time is challenging. Fourier-transform infrared (IR) spectroscopy provides the gold-standard for performance characterization yet is expensive and inflexible-incorporating the PCM tuning mechanism is not straightforward, hence in situ electro-optical measurements are challenging. In this work, we implement an open-source MATLAB ® -controlled real-time performance characterization system consisting of an inexpensive linear variable filter (LVF) and mid-wave IR camera, capable of switching the PCM-based filters while simultaneously recording in situ filter performance metrics and spectral filtering profile. These metrics are calculated through pixel intensity measurements and displayed on a custom-developed graphical user interface in real-time. The CWL is determined through spatial position of intensity maxima along the LVF's longitudinal axis. Furthermore, plans are detailed for a future experimental system that further reduces cost, is compact, and utilizes a near-IR camera. © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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Section: Comparison To Other Spectroscopic Techniquesmentioning

confidence: 99%

Automated real-time spectral characterization of phase-change tunable filters using a linear variable filter and IR camera for wide-field MWIR imaging

et al. 2021

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“…Currently, FTS are no longer restricted to laboratory applications. Microelectromechanical systems (MEMS) technology has been successfully employed to make FTS portable, inexpensive and miniaturized [5,6], so these portable FTS devices can be used for real-time, on-site measurement and 1…”

Section: Introductionmentioning

confidence: 99%

Review of MEMS Based Fourier Transform Spectrometers

et al. 2020

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Fourier transform spectrometers (FTS), mostly working in infrared (IR) or near infrared (NIR) range, provide a variety of chemical or material analysis with high sensitivity and accuracy and are widely used in public safety, environmental monitoring and national border security, such as explosive detection. However, because of being bulky and expensive, they are usually used in test centers and research laboratories. Miniaturized FTS have been developed rapidly in recent years, due to the increasing demands. Using micro-electromechanical system (MEMS) micromirrors to replace the movable mirror in a conventional FTS system becomes a new realm. This paper first introduces the principles and common applications of conventional FTS, and then reviews various MEMS based FTS devices.

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“…This type of spectrometer can be classified into two categories based on spectroscopic principles: (1) nondispersive methods and (2) dispersive methods. The typical representatives of the former are the Fourier transform spectrometer (FTS) [ 4 ], the Fabry–Perot interferometer (FPI) [ 5 , 6 ], the grating light modulator spectrometer [ 7 ] and the quantum dot spectrometer [ 8 ]. Sandner proposed a Fourier transform spectrometer that utilizes an out-of-plane MEMS mirror in 2007 [ 9 ].…”

Section: Introductionmentioning

confidence: 99%

Miniaturized NIR Spectrometer Based on Novel MOEMS Scanning Tilted Grating

et al. 2018

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This paper presents a dispersive near-infrared spectrometer with features of miniaturization, portability and low cost. The application of a resonantly-driven scanning grating mirror (SGM) as a dispersive element in a crossed Czerny–Turner configuration enables the design of a miniaturized spectrometer that can detect the full spectra using only one single InGaAs diode. In addition, a high accuracy recalculation is realized, which can convert time-dependent measurements to spectrum information by utilizing the deflection position detector integrated on SGM and its associated closed-loop control circuit. Finally, the spectrometer prototype is subjected to a series of tests to characterize the instrument’s performance fully. The results of the experiment show that the spectrometer works in a spectral range of 800 nm–1800 nm with a resolution of less than 10 nm, a size of 9 × 7 × 7 cm3, a wavelength stability better than ±1 nm and a measuring time of less than 1 ms. Furthermore, the power consumption of the instrument is 3 W at 5 V DC, and the signal-to-noise ratio is 3267 at full scale. Therefore, this spectrometer could be a potential alternative to classical spectrometers in process control applications or could be used as a portable or airborne spectroscopic sensor.

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Miniature fourier transform spectrometers based on electrothermal MEMS mirrors with large piston scan range

Cited by 9 publications

References 12 publications

Automated real-time spectral characterization of phase-change tunable filters using a linear variable filter and IR camera for wide-field MWIR imaging

Automated real-time spectral characterization of phase-change tunable filters using a linear variable filter and IR camera for wide-field MWIR imaging

Review of MEMS Based Fourier Transform Spectrometers

Miniaturized NIR Spectrometer Based on Novel MOEMS Scanning Tilted Grating

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