Miniature MEMS: Novel Key Components Toward Terahertz Reconfigurability

Abstract

We present an overview of the emerging and enabling miniature MEMS-based components for the terahertz frequencies. The usage of miniature MEMS integrated within the terahertz components is an uprising field of research, which offers reconfigurability, improved performance, and ability to perform unprecedented functions that cannot be achieved using the state-of-the-art semiconductor and optical technologies. In this paper, we discuss the recent progress and future of miniature MEMS-based reconfigurable components and present examples including reconfigurable sources, detectors, metamaterials, and guided-wave components.

Tamm-cavity terahertz detector

“…Note that the features of terahertz microcavities are of the order of the thickness of the substrates of the terahertz devices, so researchers have also begun to use the substrates as FP cavities when constructing electromagnetic confinement devices 61 – 63 . To obtain a tunable terahertz device, the length of the cavity can be changed with an electronically controlled displacement platform or a microelectromechanical system (MEMS) with micrometer precision 64 , 65 . These FP cavities have greatly facilitated the development of terahertz components that are continuously frequency adjustable and have a wideband response 66 , 67 .…”

Terahertz Detectors Using Microelectromechanical System Resonators

“…Furthermore, MEMS/NEMS resonators can be fabricated using microfabrication techniques, which makes them relatively inexpensive and easy to mass-produce. They also have the potential for integration with other MEMS devices, such as filters, switches, and amplifiers, for on-chip signal processing [60,61]. The MEMS resonator, typically a microcantilever or a doubly-clamped beam, can be driven into resonant oscillation by an external circuit and work as a bolometer for THz radiation detection.…”

Quantized energy harvesting in vibrating maglev graphite driven by terahertz waves

“…For example, THz wave energy is small, resulting in little damage to cells and other organisms, so it has high biosafety, 45 and could be used to drive micro-nano robots in living organisms. However, the current focus is on the use of micro-nano mechanical systems to generate or control THz waves, [46][47][48][49][50][51][52] and the use of THz waves to drive micro-nano mechanical systems is less researched.…”