Miniaturized ceramic differential scanning calorimeter with integrated oven and crucible in LTCC technology

Missal, Wjatscheslaw; Kita, Jarosław; Wappler, Eberhard; Gora, Frieder; Kipka, Annette; Bartnitzek, Thomas; Bechtold, Franz; Schabbel, Dirk; Capraro, Beate; Moos, Ralf

doi:10.1016/j.sna.2011.01.025

Cited by 22 publications

(5 citation statements)

References 6 publications

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“…The temperature range is up to 600 • C. The sensitivity and thermal resolution are comparable to conventional DSC devices. Proof of functionality and various measurements can be found in Missal et al (2011Missal et al ( , 2012 and Brandenburg et al (2016).…”

Section: Setup Of the Miniaturized Ceramic Dsc Chipmentioning

confidence: 99%

“…Furthermore, high operating and maintenance costs are incurred, and aggressive materials or reaction products may contaminate or damage the furnace. These disadvantages led to the development of a miniaturized DSC chip with an integrated heater (Missal et al, 2011;Kita et al, 2013;Brandenburg et al, 2016). The sensor is fully manufactured using low temperature co-fired ceramics (LTCC) technology and exhibits high heating and cooling rates due to its low thermal mass.…”

Section: Introductionmentioning

confidence: 99%

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Miniaturized differential scanning calorimeter with an integrated mass sensing system: first steps

Distler

Wöhrl²,

Werner³

et al. 2023

J. Sens. Sens. Syst.

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Abstract. In this paper, the first steps towards integrating a mass sensing system into an existing miniaturized ceramic DSC (differential scanning calorimetry) chip are presented. A vibration setup is developed based on the mass-dependent change in frequency of the DSC chip as an oscillating cantilever. A simulation model reveals that the resolution of the measurement can be improved by reducing the chip thickness. In this study, different measurement methods (acoustic, optical, and piezoresistive) are investigated. Three complete measurement systems are set up and evaluated with regard to their integration in the DSC chip. All presented measurement methods show promising results and already allow mass measurements with a resolution of 100 µg.

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Section: Setup Of the Miniaturized Ceramic Dsc Chipmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Miniaturized differential scanning calorimeter with an integrated mass sensing system: first steps

Distler

Wöhrl²,

Werner³

et al. 2023

J. Sens. Sens. Syst.

Self Cite

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“…This increases the sensitivity. Additionally, structuring of green LTCC sheets is easier than structuring of sintered ceramics, which has been reported for complex structures for applications with similar demands (Kita et al, 2005;Missal et al, 2011). For the thermocouples, the choice of materials is very limited.…”

Section: Initial Design Fem Modeling and Fabrication Of The Sensor mentioning

confidence: 99%

First steps to develop a sensor for a Tian–Calvet calorimeter with increased sensitivity

Schubert

Gollner²,

Kita

et al. 2016

J. Sens. Sens. Syst.

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Abstract. Initial steps to apply a ceramic multi-layer technique to build a new sensor for a Tian-Calvet calorimeter are presented in this contribution. The new sensor has a stacked design of ceramic sensor discs and insulating rings. The development was finite-element method (FEM) supported to design the sensor disc. In the next step, the function of the sensor disc was proven up to a temperature of 600 • C. Finally, the entire stack was tested at room temperature, delivering a resolution of 5 µW and a maximum sensitivity of 8.5 µV mW −1 . The time constant is strongly dependent on the mass of the cuvette. We show that the time constant of the sensor can be more exactly characterized when using a novel low temperature co-fired ceramic (LTCC) cuvette with a low mass and an integrated heater. Then, the time constant can be reduced to T 1/e = 118 s. The new sensor shows similar specifications as commercial devices and presents a good starting point for future high temperature applications.

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“…In addition, materials can be analyzed that form aggressive gases and would damage or destroy conventional apparatuses. Detailed information about the design, manufacturing and proof of functionality is given in [1][2][3][4].…”

Section: Introductionmentioning

confidence: 99%

P07 - Development of a Miniaturized Combined DSC and TGA Sensor

Distler¹,

Kita²,

Moos³

et al. 2023

Poster

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A miniaturized sensor with both, differential scanning calorimetry (DSC) and combined thermogravimetric analysis (TGA) functionality is presented. The ceramic sensor with integrated heater features high heating and cooling rates and enables the analysis of aggressive materials. The working principle based on the mass-dependent frequency change of the chip as a vibrating cantilever is described. The analysis of copper sulfate pentahydrate (CuSO4 • 5 H2O, an often-used reference substance) proves that DSC and TGA measurements can be carried out simultaneously under real conditions.

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Miniaturized ceramic differential scanning calorimeter with integrated oven and crucible in LTCC technology

Cited by 22 publications

References 6 publications

Miniaturized differential scanning calorimeter with an integrated mass sensing system: first steps

Miniaturized differential scanning calorimeter with an integrated mass sensing system: first steps

First steps to develop a sensor for a Tian–Calvet calorimeter with increased sensitivity

P07 - Development of a Miniaturized Combined DSC and TGA Sensor

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