Miniaturized ceramic DSC device with strain gauge-based mass detection—First steps to realize a fully integrated DSC/TGA device

Brandenburg, Annica; Wappler, Eberhard; Kita, Jarosław; Moos, Ralf

doi:10.1016/j.sna.2016.02.011

Cited by 9 publications

(9 citation statements)

References 13 publications

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“…In a more recent attempt, a low temperature co-fired ceramic (LTCC)-based microfluidic Clark-type O 2 sensor was used for real-time monitoring of localized DO [ 84 ]. The advantages outlined for the LTCC materials include hermeticity and mechanical durability, high scalable prototyping/manufacturing, and the ability to directly integrate both electronic and microfluidic with a compact 3D package [ 100 , 101 , 102 ]. The EC sensor consisted of a solid proton conductive electrolyte that facilitated the fabrication process and improved shelf life.…”

Section: Oxygen Sensors In On-chip Systemsmentioning

confidence: 99%

Microfluidic-Based Oxygen (O2) Sensors for On-Chip Monitoring of Cell, Tissue and Organ Metabolism

et al. 2021

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Oxygen (O2) quantification is essential for assessing cell metabolism, and its consumption in cell culture is an important indicator of cell viability. Recent advances in microfluidics have made O2 sensing a crucial feature for organ-on-chip (OOC) devices for various biomedical applications. OOC O2 sensors can be categorized, based on their transducer type, into two main groups, optical and electrochemical. In this review, we provide an overview of on-chip O2 sensors integrated with the OOC devices and evaluate their advantages and disadvantages. Recent innovations in optical O2 sensors integrated with OOCs are discussed in four main categories: (i) basic luminescence-based sensors; (ii) microparticle-based sensors; (iii) nano-enabled sensors; and (iv) commercial probes and portable devices. Furthermore, we discuss recent advancements in electrochemical sensors in five main categories: (i) novel configurations in Clark-type sensors; (ii) novel materials (e.g., polymers, O2 scavenging and passivation materials); (iii) nano-enabled electrochemical sensors; (iv) novel designs and fabrication techniques; and (v) commercial and portable electrochemical readouts. Together, this review provides a comprehensive overview of the current advances in the design, fabrication and application of optical and electrochemical O2 sensors.

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Section: Oxygen Sensors In On-chip Systemsmentioning

confidence: 99%

Microfluidic-Based Oxygen (O2) Sensors for On-Chip Monitoring of Cell, Tissue and Organ Metabolism

et al. 2021

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“…Furthermore, high operating and maintenance costs are incurred, and aggressive materials or reaction products may contaminate or damage the furnace. These disadvantages led to the development of a miniaturized DSC chip with an integrated heater (Missal et al, 2011;Kita et al, 2013;Brandenburg et al, 2016). The sensor is fully manufactured using low temperature co-fired ceramics (LTCC) technology and exhibits high heating and cooling rates due to its low thermal mass.…”

Section: Introductionmentioning

confidence: 99%

Miniaturized differential scanning calorimeter with an integrated mass sensing system: first steps

Distler

Wöhrl²,

Werner³

et al. 2023

J. Sens. Sens. Syst.

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Abstract. In this paper, the first steps towards integrating a mass sensing system into an existing miniaturized ceramic DSC (differential scanning calorimetry) chip are presented. A vibration setup is developed based on the mass-dependent change in frequency of the DSC chip as an oscillating cantilever. A simulation model reveals that the resolution of the measurement can be improved by reducing the chip thickness. In this study, different measurement methods (acoustic, optical, and piezoresistive) are investigated. Three complete measurement systems are set up and evaluated with regard to their integration in the DSC chip. All presented measurement methods show promising results and already allow mass measurements with a resolution of 100 µg.

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“…LTCC materials were chosen because of their hermeticity and mechanical durability, highly scalable phototyping/manufacturing methods, and the ability to directly integrate both electronic and microfluidic in a compact 3D package [21][22][23]. The developed microfluidic oxygen sensor consists of an LTCC substrate with electrodes for detecting electrochemical signals, the solid-state electrolyte, oxygen permeable membrane (OPM), and a microfluidic channel (sealed to a glass slide).…”

Section: Introductionmentioning

confidence: 99%

A low temperature co-fired ceramic based microfluidic Clark-type oxygen sensor for real-time oxygen sensing

Luo

Dziubla

Eitel

2017

Sensors and Actuators B: Chemical

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a b s t r a c tIn this paper, a microfluidic platform for real-time monitoring of dissolved oxygen in a flowing microfluidic environment fabricated using low temperature co-fired ceramic (LTCC) technology is described. The fabricated Clark-type oxygen sensor consisted of three electrodes (working electrode, counter electrode and Ag/AgCl reference electrode), a solid-state proton conductive matrix (Nafion 117 membrane) and polydimethylosiloxane (PDMS) as the oxygen permeable membrane (OPM). The use of a solid-state proton conductive matrix as the electrolyte in the design of the oxygen sensor makes it feasible integrate this device in a typical LTCC fabrication process. Cyclic voltammetry and chronoamperometry measurement were used to characterize electrochemical properties of the developed oxygen sensor. The reduction current was linearly related with the dissolved oxygen concentration ranging from 0 to 8.1 mg/l under different flow conditions (0.0-1.0 ml/min). The residual currents of the oxygen sensor were less than 3.5% of that measured in oxygen saturated state, and the average response time was 10.9 s. The current device represents an improved Clark-type oxygen sensor with the advantages of easy fabrication, flexible configuration, fast response time, incorporation of microfluidic analyte introduction and real-time detection of dissolved oxygen. The potential applications include material synthesis, cell culture, biological assays incorporating controlled introduction of reagents or analytes and real-time monitoring of dissolved oxygen in a microfluidic environment.

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Miniaturized ceramic DSC device with strain gauge-based mass detection—First steps to realize a fully integrated DSC/TGA device

Cited by 9 publications

References 13 publications

Microfluidic-Based Oxygen (O2) Sensors for On-Chip Monitoring of Cell, Tissue and Organ Metabolism

Microfluidic-Based Oxygen (O2) Sensors for On-Chip Monitoring of Cell, Tissue and Organ Metabolism

Miniaturized differential scanning calorimeter with an integrated mass sensing system: first steps

A low temperature co-fired ceramic based microfluidic Clark-type oxygen sensor for real-time oxygen sensing

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