Miniaturized SAW designs using high aspect ratio electrodes

Abstract

The aim of this work is to miniaturize SAW filters using massive high aspect ratio metallic electrodes. These structures are capable of slowing down the surface wave and reduce the wave-length by 10 times. It is therefore expected that the size of devices using such high metal thickness is reduced by a significant amount. In this work, the relationship of the SAW propagation properties to substrate orientation and metallization thickness is studied theoretically using FEM-BIM approach and experimentally in order to achieve designs of a filter demonstrating a size miniaturization by a factor of 2 and a very low loss 20% bandwidth filters both at 40MHz range. This technique is very promising to miniaturize SAW filter at both low and radio frequency.