We report multifunctional operation based on the nonlinear dynamics in a single microelectromechanical system (MEMS) resonator. This Letter focuses on a logic-memory device that uses a closed loop control and a nonlinear MEMS resonator in which multiple states coexist. To obtain both logic and memory operations in a MEMS resonator, we examine the nonlinear dynamics with and without control input. Based on both experiments and numerical simulations, we develop a novel device that combines an OR gate and memory functions in a single MEMS resonator.PACS numbers: 85.85.+j, 05.45.-a, 62.40.+i, 45.80.+r, Microelectromechanical systems or nanoelectromechanical systems (MEMS or NEMS) resonators have been developed for use as filters, frequency references, and sensor elements [1]. Recently, significant research has focused on mechanical computation based on MEMS or NEMS resonators [2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17]. Some studies have shown that a single mechanical resonator can be used as a mechanical 1-bit memory [2,3,5,7,8,[11][12][13]15] or as mechanical logic gates [6,9,10]. Recently, multifunctional operation has been demonstrated in the form of a shift-register and a controlled NOT gate made from a single mechanical resonator [17]. The next phase is to use a closed loop control to generate multifunction devices, which consist of memory and multiple-input gates, in a single device. The closed loop allows output and excitation signals to be fixed at a single frequency. The goal of the work presented in this Letter is to develop multifunction operation from a nonlinear MEMS resonator in which multiple states coexist with closed loop control.Nonlinear dynamical responses are commonly observed in a MEMS resonator. The nonlinear dynamics of the MEMS resonator is well known to be described by the Duffing equation [2,8,12,[18][19][20]. Such a nonlinear MEMS resonator has hysteretic characteristics, which lead to two stable states and one unstable state, depending on the frequency [1,21] or excitation force [6,15].This Letter focuses on fabricating a multifunction device that offers logic and memory (called a "logic-memory device"). To do this, we examine the nonlinear dynamics in a MEMS resonator with and without control input. In the following, we discuss the experiments and numerical simulations that allowed us to develop a device that combines multiple-input gate and memory functions in a single nonlinear MEMS resonator.The proposed comb-drive MEMS resonator is shown in Fig. 1. The resonator consists of a perforated mass with a width, length, and thickness of 175, 575, and 25 µm, respectively [19,22,23]. When the comb-drive resonator is electrically excited, the mass vibrates in the lateral direction. The vibration of the mass is detected by using a differential measurement [24] in vacuum (around 10 Pa) at room temperature. The output voltage of the differential measurement is V out ∝ v ac A e sin(2ω e t + φ e ), where A e denotes the displacement amplitude and φ e is the phase. The vibration di...