Mitigation of Localized Charging Induced in Insulating Materials by a Focused Ion Beam

Stevens‐Kalceff, Marion A.; Levick, Katie J.

doi:10.1017/s1431927604884575

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B Limiting Factors In Imaging Resolution and Contrast1

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2008

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“…16,17 A high signal-to-noise ͑S/N͒ ratio for emitted SEs is also important for high-quality image acquisition. If the sample is an insulator, SEM and SGIM may therefore lead to important charging effects in the sample as charge builds up on the surface.…”

Section: B Limiting Factors In Imaging Resolution and Contrastmentioning

confidence: 99%

Superior imaging resolution in scanning helium-ion microscopy: A look at beam-sample interactions

Cohen-Tanugi

Yao

2008

Journal of Applied Physics

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Articles you may be interested inAnalysis of subsurface beam spread and its impact on the image resolution of the helium ion microscope Scanning helium-ion microscopy ͑SHIM͒ offers high-resolution imaging at the subnanometer scale. We employ Monte Carlo simulations to show the characteristics of the beam-sample interaction involved in SHIM, and compare it with those of scanning electron microscopy and scanning gallium-ion microscopy. We discuss the electronic and nuclear stopping powers and demonstrate that helium ions in matter possess a distinctive "electronic loss phase" in which inelastic collisions strongly dominate. This allows for large penetration depth, localized secondary electron emission, and high signal-to-noise ratio. We investigate the energy dependence of the interaction volume and show that for SHIM, spatial resolution can be further increased with energies beyond the customary 30 keV level. This paper provides a better understanding of the physics of SHIM and its conditions for high performance.

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Section: B Limiting Factors In Imaging Resolution and Contrastmentioning

confidence: 99%

Superior imaging resolution in scanning helium-ion microscopy: A look at beam-sample interactions

Cohen-Tanugi

Yao

2008

Journal of Applied Physics

View full text Add to dashboard Cite

show abstract

Mitigation of Localized Charging Induced in Insulating Materials by a Focused Ion Beam

Abstract: Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Cited by 1 publication

References 2 publications

Superior imaging resolution in scanning helium-ion microscopy: A look at beam-sample interactions

Superior imaging resolution in scanning helium-ion microscopy: A look at beam-sample interactions

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