“…Thefunctionalization of solid surfaces with self-assembled monolayers (SAMs) is aw idely applied method for surface modifications with applications in catalysis, [1][2][3] chemical and biochemical sensing, [4][5][6] molecular electronics, [7][8][9] wettability, [10] corrosion prevention, [11] and many others.V arious functionalization methods rely on as tepwise assembly or am odification of the SAMs. [12] Due to the differences in the chemical and physical behavior of molecules attached to surfaces compared to their crystalline or liquid form, the composition of these molecular layers is ideally characterized upon each assembly and modification step.For such purposes, however, only af ew surface analytical methods exist that provide ahigh enough sensitivity to determine the elemental composition (X-ray photoelectron spectroscopy), the topology (scanning tunneling microscopy,a tomic force microscopy), the lattice structure (near-edge X-ray absorption fine structure spectroscopy), the surface layer thickness (ellipsometry), or the surface coverage (thermal gravimetric analysis and electrochemical methods).…”