The near-edge fine structure of the Fe2p and Si2p X-ray absorption spectra (NEXAFS) of iron3 oxygen nanolayers on the surface of single-crystal silicon (100) was studied for the first time. The structure of the quasi-2D iron3oxygen nanosystems synthesized by molecular layering was considered on this basis.At present the chemical and physical properties of nanostructures are being actively studied to develop the knowledge of the low-dimensional state of substance. Note that the physical chemical properties of quasi-2D oxide nanostructures (nanosystems and nanolayers) are explored insufficiently because of the lack of scientific substantiation for their reproducible synthesis [1, 2] and the lack of developed modern experimental methods for their structural studies. Over the past two decades the molecular layering technique developed by Russian researchers [3] has gained wide application in the synthesis of nanosystems. This technique is known as atomic layer epitaxy3atomic layer deposition (ALE3ALD) [4].When highly organized nanostructures in a magnetically ordered state, e.g. superlattices, and containing iron-oxygen monolayers or separate iron3oxygen groups as the main component are synthesized by molecular layering, it is essential to characterize the structure of the resulting iron3oxygen products by various physical methods and to study possible phaseforming processes (for example, a-Fe 2 O 3 formation). Such processes essentially restrict the possibilities for directedly controlling the composition, structure, and properties of the synthesized oxide nanostructures. Thus, one of the major problems in the synthesis of low-dimensional structures is to find conditions for forming one or several monolayers of iron-containing groups without phase formation.In this work we represent the results of the first investigation of two-dimensional (Fe3O) n /Si(100) nanostructures synthesized by molecular layering and containing various number of iron3oxygen monolayers on the surface of single-crystal silicon. This study is based on an analysis of the near-edge fine structure of the Fe2p 3/2 and Si2p 1/2,3/2 X-ray absorption spectra of these nanosystems. This method, which is often called NEXAFS (Near-Edge X-ray Absorption Fine Structure) spectroscopy, possesses unique possibilities and is widely used in modern fundamental and applied research to describe local electronic and atomic structures of various polyatomic systems (free and adsorbed molecules, complexes, clusters, near-surface layers, and bulk solids) [5,6].When NEXAFS spectroscopy is used to characterize polyatomic systems of the first raw transition metals, 2p absorption spectra of 3d atoms are of special interest. In this case, the structure of the absorption spectra is predetermined by dipole-allowed transitions of inner 2p electrons of the metal atom into unoccupied electronic states of the polyatomic system, which involve 3d and 4s states of the metal atom. In view of the fact that 2p63d electronic transitions are dominating (transitions into 4s states are~20 ...