MMS Technology: First Results and Prospects

Bogachev, Evgeniy; Lakhin, Anton; Тимофеев, А. Н.

doi:10.1002/9781118932995.ch26

Cited by 7 publications

(2 citation statements)

References 4 publications

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“…However, methylsilane (MS, CH 3 SiH 3 ) is currently regarded as a promising alternative to halogens. 6,7 The main advantages of MS are the environmental safety of the process due to the absence of chlorine, the relative simplicity of the gas phase composition, low process temperatures (∼570−700 • C), and simpler hardware for CVI reactors. One of the most noticeable disadvantages of MS as a precursor in the CVI is a tendency to the development of homogeneous nucleation, especially at elevated temperature (above 670 • C) and partial pressure (more than 50 Pa).…”

Section: Introductionmentioning

confidence: 99%

“…Halogen‐based precursors have received the greatest practical application. However, methylsilane (MS, CH 3 SiH 3 ) is currently regarded as a promising alternative to halogens 6,7 . The main advantages of MS are the environmental safety of the process due to the absence of chlorine, the relative simplicity of the gas phase composition, low process temperatures (∼570−700°C), and simpler hardware for CVI reactors.…”

Section: Introductionmentioning

confidence: 99%

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Experimental study and numerical modeling of pulse CVI for the production of organomorphic C/SiC composites

Kulik¹,

Bogachev

Kulik

2021

Int J Applied Ceramic Tech

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During the recent years, considerable attention has been given to the development of efficient and environmentally friendly technologies for the production of ceramic matrix composites. However, little research has been carried out on use of methylsilane (MS) as a halogen‐free precursor in the CVI process. The goal of this work was therefore to study the production of SiC‐matrix composites by pulse chemical vapor infiltration (PCVI) method with MS as a precursor and recently developed organomorphic frameworks as preforms. Experimental research was combined with numerical modeling to get deeper insight into the physical mechanisms underlying the technological process. Results of the study demonstrated that the PCVI allows performing the process with higher densification rate compared to continuous‐flow modifications of CVI. It is shown that optimization of PCVI providing a compromise between the utilization efficiency of the precursor, the densification uniformity, and the process time requires a proper choice of duration of the deposition stage and the process temperature. Numerical modeling proved to be a helpful tool in research and development of PCVI technology.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%