Mobile electric charges on insulating oxides with application to oxide covered silicon p-n junctions

Design guidelines for releasing silicon nanowire arrays by liquid and vapor phase hydrofluoric acid

“…Charges are known to accumulate from the environment and migrate across insulating surfaces on silicon chips. Transport of both positive and negative charges has been observed in the presence of lateral electric field [32]. Electrostatic attraction can also occur due to difference in the work function of approaching surfaces.…”

Classification and Applications of Humidity Sensors: A Review

“…W. J. Fleming [46,79] has shown that the physical mechanism operating for ionic type humidity sensors is the same for both the capacitive and resistive types. a) Identification of the Charge Carriers: Experimental studies [47][48] have shown that humidity enhanced conduction on nonconducting surfaces is entirely due to electrical charges residing on the external surfaces. The simultaneous measurement of surface charge and conduction charge by means of Kelvin probe and an integrating ammeter, has proved that humidity enhanced conduction must be the result of an ionic charge flow on the external surface of the solid.…”

Surface Characterization and Interfacial Adhesion in MEMS Devices

“…Early in the development of integrated-circuit (IC) technology, charge migration was the source of device instabilities. Transport of both positive and negative ionic species has been observed in the presence of lateral electrical fields (Shockley, 1964). Electrostatic attraction may also arise due to a difference in the work function of the approaching surfaces.…”